NL2022892A - Optical fiber - Google Patents

Optical fiber Download PDF

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Publication number
NL2022892A
NL2022892A NL2022892A NL2022892A NL2022892A NL 2022892 A NL2022892 A NL 2022892A NL 2022892 A NL2022892 A NL 2022892A NL 2022892 A NL2022892 A NL 2022892A NL 2022892 A NL2022892 A NL 2022892A
Authority
NL
Netherlands
Prior art keywords
radiation
optical fiber
substrate
support portion
hollow core
Prior art date
Application number
NL2022892A
Other languages
English (en)
Inventor
Sebastian Uebel Patrick
Thomas Bauerschmidt Sebastian
Maximilian Götz Peter
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Priority to NL2022892A priority Critical patent/NL2022892A/en
Publication of NL2022892A publication Critical patent/NL2022892A/en

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Claims (1)

1. Een lithografieinrichting omvattende: een belichtinginrichting ingericht voor het leveren van een stralingsbundel; een drager geconstrueerd voor het dragen van een patroneerinrichting, welke patroneerinrichting in staat is een patroon aan te brengen in een doorsnede van de stralingsbundel ter vorming van een gepatroneerde stralingsbundel; een substraattafel geconstrueerd om een substraat te dragen; en een projectiemrichting ingericht voor het projecteren van de gepatroneerde stralingsbundel op een doelgebied van het substraat, met het kenmerk, dat de substraattafel is ingericht voor het positioneren van het doelgebied van het substraat in een brandpuntsvlak van de projectiemrichting.
NL2022892A 2019-04-08 2019-04-08 Optical fiber NL2022892A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL2022892A NL2022892A (en) 2019-04-08 2019-04-08 Optical fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2022892A NL2022892A (en) 2019-04-08 2019-04-08 Optical fiber

Publications (1)

Publication Number Publication Date
NL2022892A true NL2022892A (en) 2019-04-23

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ID=66284927

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2022892A NL2022892A (en) 2019-04-08 2019-04-08 Optical fiber

Country Status (1)

Country Link
NL (1) NL2022892A (nl)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3812807A1 (en) 2019-10-24 2021-04-28 ASML Netherlands B.V. Hollow-core photonic crystal fiber based optical component for broadband radiation generation
EP3839586A1 (en) 2019-12-18 2021-06-23 ASML Netherlands B.V. Hollow-core photonic crystal fiber based optical component for broadband radiation generation
US11333825B2 (en) 2019-11-07 2022-05-17 Asml Netherlands B.V. Method of manufacture of a capillary for a hollow-core photonic crystal fiber

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3812807A1 (en) 2019-10-24 2021-04-28 ASML Netherlands B.V. Hollow-core photonic crystal fiber based optical component for broadband radiation generation
WO2021078690A1 (en) 2019-10-24 2021-04-29 Asml Netherlands B.V. Hollow-core photonic crystal fiber based optical component for broadband radiation generation
US11774671B2 (en) 2019-10-24 2023-10-03 Asml Netherlands B.V. Hollow-core photonic crystal fiber based optical component for broadband radiation generation
EP4365653A2 (en) 2019-10-24 2024-05-08 ASML Netherlands B.V. Hollow-core photonic crystal fiber based optical component for broadband radiation generation
US11333825B2 (en) 2019-11-07 2022-05-17 Asml Netherlands B.V. Method of manufacture of a capillary for a hollow-core photonic crystal fiber
EP3839586A1 (en) 2019-12-18 2021-06-23 ASML Netherlands B.V. Hollow-core photonic crystal fiber based optical component for broadband radiation generation

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