NL2006014A - Stage system calibration method, stage system, and lithographic apparatus comprising such stage system. - Google Patents
Stage system calibration method, stage system, and lithographic apparatus comprising such stage system. Download PDFInfo
- Publication number
- NL2006014A NL2006014A NL2006014A NL2006014A NL2006014A NL 2006014 A NL2006014 A NL 2006014A NL 2006014 A NL2006014 A NL 2006014A NL 2006014 A NL2006014 A NL 2006014A NL 2006014 A NL2006014 A NL 2006014A
- Authority
- NL
- Netherlands
- Prior art keywords
- stage
- frequency range
- substrate
- patterning device
- encoder
- Prior art date
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Claims (1)
1. Een lithografieinrichting omvattende: een belichtinginrichting ingericht voor het leveren van een stralingsbundel; een drager geconstrueerd voor het dragen van een patroneerinrichting, welke patroneerinrichting in staat is een patroon aan te brengen in een doorsnede van de stralingsbundel ter vorming van een gepatroneerde stralingsbundel; een substraattafel geconstrueerd om een substraat te dragen; en een projectieinrichting ingericht voor het projecteren van de gepatroneerde stralingsbundel op een doelgebied van het substraat, met het kenmerk, dat de substraattafel is ingericht voor het positioneren van het doelgebied van het substraat in een brandpuntsvlak van de projectieinrichting.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US31104310P | 2010-03-05 | 2010-03-05 | |
US31104310 | 2010-03-05 | ||
US31714810P | 2010-03-24 | 2010-03-24 | |
US31714810 | 2010-03-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
NL2006014A true NL2006014A (en) | 2011-09-06 |
Family
ID=45220286
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL2006014A NL2006014A (en) | 2010-03-05 | 2011-01-17 | Stage system calibration method, stage system, and lithographic apparatus comprising such stage system. |
Country Status (1)
Country | Link |
---|---|
NL (1) | NL2006014A (nl) |
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2011
- 2011-01-17 NL NL2006014A patent/NL2006014A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WDAP | Patent application withdrawn |
Effective date: 20120604 |