NL2002126A1 - Diffusion oven and method for temperature conduction. - Google Patents

Diffusion oven and method for temperature conduction.

Info

Publication number
NL2002126A1
NL2002126A1 NL2002126A NL2002126A NL2002126A1 NL 2002126 A1 NL2002126 A1 NL 2002126A1 NL 2002126 A NL2002126 A NL 2002126A NL 2002126 A NL2002126 A NL 2002126A NL 2002126 A1 NL2002126 A1 NL 2002126A1
Authority
NL
Netherlands
Prior art keywords
temperature conduction
diffusion oven
oven
diffusion
conduction
Prior art date
Application number
NL2002126A
Other languages
Dutch (nl)
Other versions
NL2002126C2 (en
Inventor
Christoph Koeckert
Udo Willkommen
Hans-Christian Hecht
Sabine Gregor
Vivian Alberts
Original Assignee
Ardenne Anlagentech Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ardenne Anlagentech Gmbh filed Critical Ardenne Anlagentech Gmbh
Publication of NL2002126A1 publication Critical patent/NL2002126A1/en
Priority to NL2004793A priority Critical patent/NL2004793C2/en
Application granted granted Critical
Publication of NL2002126C2 publication Critical patent/NL2002126C2/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45593—Recirculation of reactive gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Furnace Details (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
NL2002126A 2007-10-25 2008-10-23 DIFFUSION OVEN AND METHOD FOR TEMPERATURE GUIDANCE. NL2002126C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL2004793A NL2004793C2 (en) 2007-10-25 2010-06-01 DIFFUSION OVEN AND METHOD FOR TEMPERATURE GUIDANCE.

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102007051445 2007-10-25
DE102007051445 2007-10-25
DE102007053863 2007-11-09
DE102007053863 2007-11-09

Publications (2)

Publication Number Publication Date
NL2002126A1 true NL2002126A1 (en) 2009-04-28
NL2002126C2 NL2002126C2 (en) 2010-06-07

Family

ID=40490496

Family Applications (2)

Application Number Title Priority Date Filing Date
NL2002126A NL2002126C2 (en) 2007-10-25 2008-10-23 DIFFUSION OVEN AND METHOD FOR TEMPERATURE GUIDANCE.
NL2004793A NL2004793C2 (en) 2007-10-25 2010-06-01 DIFFUSION OVEN AND METHOD FOR TEMPERATURE GUIDANCE.

Family Applications After (1)

Application Number Title Priority Date Filing Date
NL2004793A NL2004793C2 (en) 2007-10-25 2010-06-01 DIFFUSION OVEN AND METHOD FOR TEMPERATURE GUIDANCE.

Country Status (2)

Country Link
DE (1) DE102008052571A1 (en)
NL (2) NL2002126C2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118407138A (en) * 2024-07-03 2024-07-30 博海新能源(合肥)有限公司 Boron diffusion furnace for solar cell manufacturing

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120168143A1 (en) * 2010-12-30 2012-07-05 Poole Ventura, Inc. Thermal Diffusion Chamber With Heat Exchanger
WO2014142975A1 (en) * 2013-03-14 2014-09-18 Poole Ventura, Inc. Thermal diffusion chamber with convection compressor
CN114686974A (en) * 2022-03-30 2022-07-01 上海埃延半导体有限公司 Reactor for substrate epitaxy

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2700365A (en) * 1951-10-08 1955-01-25 Ohio Commw Eng Co Apparatus for plating surfaces with carbonyls and other volatile metal bearing compounds
DE2222050B2 (en) * 1972-05-05 1975-08-21 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Method and device for vacuum sintering pressed bodies containing hydrocarbons from powdered starting materials
US4802441A (en) * 1987-01-08 1989-02-07 Btu Engineering Corporation Double wall fast cool-down furnace
JPH06349753A (en) * 1993-06-07 1994-12-22 Kokusai Electric Co Ltd Heater unit cooling device
FR2732962B1 (en) * 1995-04-12 1997-07-04 Europ Propulsion PROCESS FOR CHEMICAL VAPOR INFILTRATION OF A MATERIAL COMPOSED OF CARBON AND SILICON AND / OR BORON
US6572368B1 (en) * 2002-08-20 2003-06-03 Lectrotherm, Inc. Method and apparatus for cooling a furnace
NL1030360C2 (en) * 2005-11-07 2007-05-08 Holding Mij Wilro B V Furnace and method for the production of photovoltaic solar cells using a diffusion process.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118407138A (en) * 2024-07-03 2024-07-30 博海新能源(合肥)有限公司 Boron diffusion furnace for solar cell manufacturing
CN118407138B (en) * 2024-07-03 2024-09-06 博海新能源(合肥)有限公司 Boron diffusion furnace for solar cell manufacturing

Also Published As

Publication number Publication date
NL2004793A (en) 2010-09-08
NL2004793C2 (en) 2011-03-21
NL2002126C2 (en) 2010-06-07
DE102008052571A1 (en) 2009-04-30

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Legal Events

Date Code Title Description
AD1A A request for search or an international type search has been filed
V1 Lapsed because of non-payment of the annual fee

Effective date: 20150501