NL194893B - Zeeman-ellipsometer. - Google Patents

Zeeman-ellipsometer.

Info

Publication number
NL194893B
NL194893B NL9202303A NL9202303A NL194893B NL 194893 B NL194893 B NL 194893B NL 9202303 A NL9202303 A NL 9202303A NL 9202303 A NL9202303 A NL 9202303A NL 194893 B NL194893 B NL 194893B
Authority
NL
Netherlands
Prior art keywords
sailor
ellipsometer
sailor ellipsometer
Prior art date
Application number
NL9202303A
Other languages
English (en)
Other versions
NL9202303A (nl
NL194893C (nl
Inventor
Klaas Hemmes
Maurits Matthijs Wind
Rudolf Lepoole
Philip Ernst Habing
Original Assignee
Univ Delft Tech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Delft Tech filed Critical Univ Delft Tech
Priority to NL9202303A priority Critical patent/NL194893C/nl
Priority to AU58441/94A priority patent/AU5844194A/en
Priority to PCT/NL1993/000283 priority patent/WO1994016310A1/en
Publication of NL9202303A publication Critical patent/NL9202303A/nl
Publication of NL194893B publication Critical patent/NL194893B/nl
Application granted granted Critical
Publication of NL194893C publication Critical patent/NL194893C/nl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/04—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by beating two waves of a same source but of different frequency and measuring the phase shift of the lower frequency obtained

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
NL9202303A 1992-12-31 1992-12-31 Zeeman-ellipsometer. NL194893C (nl)

Priority Applications (3)

Application Number Priority Date Filing Date Title
NL9202303A NL194893C (nl) 1992-12-31 1992-12-31 Zeeman-ellipsometer.
AU58441/94A AU5844194A (en) 1992-12-31 1993-12-30 Zeeman ellipsometer
PCT/NL1993/000283 WO1994016310A1 (en) 1992-12-31 1993-12-30 Zeeman ellipsometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL9202303A NL194893C (nl) 1992-12-31 1992-12-31 Zeeman-ellipsometer.
NL9202303 1992-12-31

Publications (3)

Publication Number Publication Date
NL9202303A NL9202303A (nl) 1994-07-18
NL194893B true NL194893B (nl) 2003-02-03
NL194893C NL194893C (nl) 2003-06-04

Family

ID=19861714

Family Applications (1)

Application Number Title Priority Date Filing Date
NL9202303A NL194893C (nl) 1992-12-31 1992-12-31 Zeeman-ellipsometer.

Country Status (3)

Country Link
AU (1) AU5844194A (nl)
NL (1) NL194893C (nl)
WO (1) WO1994016310A1 (nl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1006016C2 (nl) 1997-05-09 1998-11-10 Univ Delft Tech Ellipsometer met twee lasers.
US7688435B2 (en) 1997-09-22 2010-03-30 Kla-Tencor Corporation Detecting and classifying surface features or defects by controlling the angle of the illumination plane of incidence with respect to the feature or defect
US7714995B2 (en) 1997-09-22 2010-05-11 Kla-Tencor Corporation Material independent profiler
US7282729B2 (en) * 2003-08-20 2007-10-16 Xyratex Technology Limited Fabry-Perot resonator apparatus and method for observing low reflectivity surfaces
DE102007062052A1 (de) * 2007-12-21 2009-06-25 Siemens Ag Schichtdickenmessung an transparenten Schichten
CN103234909A (zh) * 2013-04-26 2013-08-07 北京理工大学 一种快速脉冲激光偏振度测量装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1155284B (it) * 1982-02-10 1987-01-28 Cselt Centro Studi Lab Telecom Procedimento e apparecchiatura per la misura dell'indice di rifrazione e dello spessore di materiali trasparenti
JPS61105408A (ja) * 1984-10-30 1986-05-23 Matsushita Electric Ind Co Ltd 光学測定装置
IT1184100B (it) * 1985-04-23 1987-10-22 Cselt Centro Studi Lab Telecom Ellissometro interferometrico statico
JPH03282205A (ja) * 1990-03-29 1991-12-12 Mitsubishi Electric Corp 厚さ測定装置

Also Published As

Publication number Publication date
WO1994016310A1 (en) 1994-07-21
NL9202303A (nl) 1994-07-18
AU5844194A (en) 1994-08-15
NL194893C (nl) 2003-06-04

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Legal Events

Date Code Title Description
A1B A search report has been drawn up
BC A request for examination has been filed
V1 Lapsed because of non-payment of the annual fee

Effective date: 20060701