NL184987B - Piezoelektrische film van polykristallijn zinkoxide op een substraat. - Google Patents

Piezoelektrische film van polykristallijn zinkoxide op een substraat.

Info

Publication number
NL184987B
NL184987B NLAANVRAGE7808038,A NL7808038A NL184987B NL 184987 B NL184987 B NL 184987B NL 7808038 A NL7808038 A NL 7808038A NL 184987 B NL184987 B NL 184987B
Authority
NL
Netherlands
Prior art keywords
pile
substrate
zinc oxide
electric film
polycrystalline zinc
Prior art date
Application number
NLAANVRAGE7808038,A
Other languages
English (en)
Other versions
NL7808038A (nl
NL184987C (nl
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Publication of NL7808038A publication Critical patent/NL7808038A/nl
Publication of NL184987B publication Critical patent/NL184987B/nl
Application granted granted Critical
Publication of NL184987C publication Critical patent/NL184987C/nl

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
NLAANVRAGE7808038,A 1977-07-28 1978-07-28 Piezoelektrische film van polykristallijn zinkoxide op een substraat. NL184987C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52091109A JPS5830749B2 (ja) 1977-07-28 1977-07-28 酸化亜鉛の圧電結晶膜

Publications (3)

Publication Number Publication Date
NL7808038A NL7808038A (nl) 1979-01-30
NL184987B true NL184987B (nl) 1989-07-17
NL184987C NL184987C (nl) 1989-12-18

Family

ID=14017347

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7808038,A NL184987C (nl) 1977-07-28 1978-07-28 Piezoelektrische film van polykristallijn zinkoxide op een substraat.

Country Status (7)

Country Link
US (1) US4164676A (nl)
JP (1) JPS5830749B2 (nl)
CH (1) CH632357A5 (nl)
DE (1) DE2832714C3 (nl)
FR (1) FR2399133A1 (nl)
GB (1) GB2002171B (nl)
NL (1) NL184987C (nl)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5831743B2 (ja) * 1977-09-17 1983-07-08 株式会社村田製作所 酸化亜鉛の圧電結晶膜
JPS5516554A (en) * 1978-07-21 1980-02-05 Toko Inc Manufacture of thin film of zinc oxide
US4640756A (en) * 1983-10-25 1987-02-03 The United States Of America As Represented By The United States Department Of Energy Method of making a piezoelectric shear wave resonator
DE3682378D1 (de) * 1985-12-20 1991-12-12 Avl Verbrennungskraft Messtech Messwertaufnehmer mit einem flexiblen piezoelektrischen film als messelement.
US4749900A (en) * 1986-11-17 1988-06-07 The Board Of Trustees Of The Leland Stanford Junior University Multi-layer acoustic transducer for high frequency ultrasound
US5231327A (en) * 1990-12-14 1993-07-27 Tfr Technologies, Inc. Optimized piezoelectric resonator-based networks
JP3198691B2 (ja) * 1993-01-14 2001-08-13 株式会社村田製作所 酸化亜鉛圧電結晶膜
US6127768A (en) * 1997-05-09 2000-10-03 Kobe Steel Usa, Inc. Surface acoustic wave and bulk acoustic wave devices using a Zn.sub.(1-X) Yx O piezoelectric layer device
WO2004105148A1 (ja) * 2003-05-22 2004-12-02 Fujitsu Limited 圧電素子、その製造方法、およびタッチパネル装置
JP4849840B2 (ja) * 2004-07-22 2012-01-11 早川 理絵 多目的漁礁ブロック
GB2571529B (en) * 2018-02-28 2021-04-14 Novosound Ltd Formation of piezoelectric devices

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3091707A (en) * 1960-04-07 1963-05-28 Bell Telephone Labor Inc Piezoelectric devices utilizing zinc oxide
US3409464A (en) * 1964-04-29 1968-11-05 Clevite Corp Piezoelectric materials
US3440550A (en) * 1966-10-25 1969-04-22 Minnesota Mining & Mfg Zinc oxide maximum efficiency transverse wave crystals and devices
US3471721A (en) * 1966-10-25 1969-10-07 Minnesota Mining & Mfg Zinc oxide maximum efficiency length extensional crystals and devices
US3846649A (en) * 1973-06-18 1974-11-05 Rca Corp Piezoelectric transducer comprising oriented zinc oxide film and method of manufacture
JPS5521474B2 (nl) * 1974-03-12 1980-06-10

Also Published As

Publication number Publication date
DE2832714A1 (de) 1979-02-15
DE2832714C3 (de) 1981-07-16
US4164676A (en) 1979-08-14
GB2002171A (en) 1979-02-14
GB2002171B (en) 1982-03-03
CH632357A5 (de) 1982-09-30
FR2399133B1 (nl) 1984-03-02
DE2832714B2 (de) 1980-09-04
NL7808038A (nl) 1979-01-30
FR2399133A1 (fr) 1979-02-23
NL184987C (nl) 1989-12-18
JPS5830749B2 (ja) 1983-07-01
JPS5425497A (en) 1979-02-26

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Legal Events

Date Code Title Description
A85 Still pending on 85-01-01
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
V4 Discontinued because of reaching the maximum lifetime of a patent

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