NL178700B - Apparatus for depositing a thin layer on a substrate. - Google Patents

Apparatus for depositing a thin layer on a substrate.

Info

Publication number
NL178700B
NL178700B NLAANVRAGE7404173,A NL7404173A NL178700B NL 178700 B NL178700 B NL 178700B NL 7404173 A NL7404173 A NL 7404173A NL 178700 B NL178700 B NL 178700B
Authority
NL
Netherlands
Prior art keywords
depositing
substrate
thin layer
thin
layer
Prior art date
Application number
NLAANVRAGE7404173,A
Other languages
Dutch (nl)
Other versions
NL178700C (en
NL7404173A (en
Original Assignee
Cit Alcatel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from BE129306A external-priority patent/BE797385R/en
Application filed by Cit Alcatel filed Critical Cit Alcatel
Publication of NL7404173A publication Critical patent/NL7404173A/xx
Publication of NL178700B publication Critical patent/NL178700B/en
Application granted granted Critical
Publication of NL178700C publication Critical patent/NL178700C/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/228—Gas flow assisted PVD deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3471—Introduction of auxiliary energy into the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
NLAANVRAGE7404173,A 1973-03-27 1974-03-27 Apparatus for depositing a thin layer on a substrate. NL178700C (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE129306A BE797385R (en) 1971-04-27 1973-03-27 Thin mineral film deposition appts - using plasma excited by rf induction

Publications (3)

Publication Number Publication Date
NL7404173A NL7404173A (en) 1974-10-01
NL178700B true NL178700B (en) 1985-12-02
NL178700C NL178700C (en) 1986-05-01

Family

ID=3841811

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7404173,A NL178700C (en) 1973-03-27 1974-03-27 Apparatus for depositing a thin layer on a substrate.

Country Status (7)

Country Link
US (1) US3922214A (en)
JP (1) JPS5026778A (en)
CH (1) CH581198A5 (en)
DE (1) DE2412928A1 (en)
GB (2) GB1356769A (en)
IT (1) IT1007402B (en)
NL (1) NL178700C (en)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2324755A1 (en) * 1975-09-19 1977-04-15 Anvar HIGH SPEED OF DEPOSIT CATHODIC SPRAY DEVICE
JPS5435178A (en) * 1977-08-23 1979-03-15 Matsushita Electric Ind Co Ltd Ultrafine particle depositing apparatus
DE2849240C2 (en) * 1978-11-13 1983-01-13 Siemens Ag, 1000 Berlin Und 8000 Muenchen CVD coating device for small parts and their use
DE2941908C2 (en) * 1979-10-17 1986-07-03 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Method for producing a solar cell having a silicon layer
FR2480552A1 (en) * 1980-04-10 1981-10-16 Anvar PLASMA GENERATOR
GB2085482B (en) * 1980-10-06 1985-03-06 Optical Coating Laboratory Inc Forming thin film oxide layers using reactive evaporation techniques
DE3117070A1 (en) * 1981-04-29 1982-11-18 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt METHOD FOR PRODUCING A SEMICONDUCTOR LAYER SOLAR CELL
US4895765A (en) * 1985-09-30 1990-01-23 Union Carbide Corporation Titanium nitride and zirconium nitride coating compositions, coated articles and methods of manufacture
US4839245A (en) * 1985-09-30 1989-06-13 Union Carbide Corporation Zirconium nitride coated article and method for making same
US4929322A (en) * 1985-09-30 1990-05-29 Union Carbide Corporation Apparatus and process for arc vapor depositing a coating in an evacuated chamber
US5037522B1 (en) * 1990-07-24 1996-07-02 Vergason Technology Inc Electric arc vapor deposition device
CA2065581C (en) 1991-04-22 2002-03-12 Andal Corp. Plasma enhancement apparatus and method for physical vapor deposition
DE19635669C1 (en) * 1996-09-03 1997-07-24 Fraunhofer Ges Forschung Coating large area substrate by gas flow sputtering
DE59702419D1 (en) 1997-07-15 2000-11-09 Unaxis Trading Ag Truebbach Sputter coating method and apparatus
IT1310029B1 (en) * 1999-02-26 2002-02-05 Ist Naz Fisica Della Materia PULSED MICROPLASMA VAPORIZER.
US20120048723A1 (en) * 2010-08-24 2012-03-01 Varian Semiconductor Equipment Associates, Inc. Sputter target feed system
EP3064416B1 (en) 2013-10-30 2018-09-19 Toyota Jidosha Kabushiki Kaisha Vehicle, and method of manufacturing same
JP6124020B2 (en) 2014-08-29 2017-05-10 トヨタ自動車株式会社 Charged charge reduction device for vehicles
JP6128093B2 (en) 2014-10-16 2017-05-17 トヨタ自動車株式会社 Vehicle intake system
JP6160603B2 (en) 2014-12-19 2017-07-12 トヨタ自動車株式会社 Vehicle cooling device
JP6201980B2 (en) 2014-12-25 2017-09-27 トヨタ自動車株式会社 Vehicle intake system
JP6115559B2 (en) 2014-12-26 2017-04-19 トヨタ自動車株式会社 Vehicle exhaust system
JP6183383B2 (en) 2015-01-13 2017-08-23 トヨタ自動車株式会社 vehicle
JP6365316B2 (en) 2015-01-19 2018-08-01 トヨタ自動車株式会社 Lubricating oil or fuel supply device for vehicles
EP3048017B1 (en) 2015-01-23 2017-11-08 Toyota Jidosha Kabushiki Kaisha Damping force generation device for vehicle
JP6281501B2 (en) 2015-01-29 2018-02-21 トヨタ自動車株式会社 Vehicle wheel support device
JP6248962B2 (en) 2015-02-10 2017-12-20 トヨタ自動車株式会社 Vehicle braking force generator
US11257663B2 (en) * 2017-09-11 2022-02-22 Agency For Science, Technology And Research Sputtering system and method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3408283A (en) * 1966-09-15 1968-10-29 Kennecott Copper Corp High current duoplasmatron having an apertured anode positioned in the low pressure region
US3625848A (en) * 1968-12-26 1971-12-07 Alvin A Snaper Arc deposition process and apparatus
BE766345A (en) * 1971-04-27 1971-09-16 Universitaire De L Etat A Mons DEVICE FOR MANUFACTURING THIN LAYERS OF MINERAL SUBSTANCES.

Also Published As

Publication number Publication date
IT1007402B (en) 1976-10-30
GB1356769A (en) 1974-06-12
US3922214A (en) 1975-11-25
NL178700C (en) 1986-05-01
NL7404173A (en) 1974-10-01
DE2412928A1 (en) 1974-10-03
CH581198A5 (en) 1976-10-29
GB1419239A (en) 1975-12-24
JPS5026778A (en) 1975-03-19

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Legal Events

Date Code Title Description
BA A request for search or an international-type search has been filed
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
A85 Still pending on 85-01-01
V1 Lapsed because of non-payment of the annual fee