NL169934C - ION SOURCE. - Google Patents
ION SOURCE.Info
- Publication number
- NL169934C NL169934C NL7703162A NL7703162A NL169934C NL 169934 C NL169934 C NL 169934C NL 7703162 A NL7703162 A NL 7703162A NL 7703162 A NL7703162 A NL 7703162A NL 169934 C NL169934 C NL 169934C
- Authority
- NL
- Netherlands
- Prior art keywords
- ion source
- ion
- source
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7703162A NL169934C (en) | 1977-03-23 | 1977-03-23 | ION SOURCE. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7703162A NL169934C (en) | 1977-03-23 | 1977-03-23 | ION SOURCE. |
Publications (3)
Publication Number | Publication Date |
---|---|
NL7703162A NL7703162A (en) | 1978-09-26 |
NL169934B NL169934B (en) | 1982-04-01 |
NL169934C true NL169934C (en) | 1982-09-01 |
Family
ID=19828218
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7703162A NL169934C (en) | 1977-03-23 | 1977-03-23 | ION SOURCE. |
Country Status (1)
Country | Link |
---|---|
NL (1) | NL169934C (en) |
-
1977
- 1977-03-23 NL NL7703162A patent/NL169934C/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
NL169934B (en) | 1982-04-01 |
NL7703162A (en) | 1978-09-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
V1 | Lapsed because of non-payment of the annual fee |