MY7300344A - Process for fabricating planar semiconductor devices - Google Patents

Process for fabricating planar semiconductor devices

Info

Publication number
MY7300344A
MY7300344A MY1973344A MY7300344A MY7300344A MY 7300344 A MY7300344 A MY 7300344A MY 1973344 A MY1973344 A MY 1973344A MY 7300344 A MY7300344 A MY 7300344A MY 7300344 A MY7300344 A MY 7300344A
Authority
MY
Malaysia
Prior art keywords
semiconductor devices
planar semiconductor
fabricating planar
fabricating
devices
Prior art date
Application number
MY1973344A
Other languages
English (en)
Inventor
Sabir Shaikh Mohammed
Original Assignee
Texas Instruments Incorporated
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Incorporated filed Critical Texas Instruments Incorporated
Publication of MY7300344A publication Critical patent/MY7300344A/xx

Links

Classifications

    • H10P95/00—
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H10P14/6334—
    • H10P14/6682—
    • H10P14/69215—
    • H10P14/6923—
    • H10W74/43—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
MY1973344A 1966-07-01 1973-12-31 Process for fabricating planar semiconductor devices MY7300344A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US56217866A 1966-07-01 1966-07-01

Publications (1)

Publication Number Publication Date
MY7300344A true MY7300344A (en) 1973-12-31

Family

ID=24245136

Family Applications (1)

Application Number Title Priority Date Filing Date
MY1973344A MY7300344A (en) 1966-07-01 1973-12-31 Process for fabricating planar semiconductor devices

Country Status (4)

Country Link
FR (1) FR1530053A (xx)
GB (1) GB1193310A (xx)
MY (1) MY7300344A (xx)
NL (1) NL6708915A (xx)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3600241A (en) * 1968-09-09 1971-08-17 Ibm Method of fabricating semiconductor devices by diffusion
DE2840776A1 (de) * 1978-09-19 1980-03-27 Siemens Ag Halbleiterbauelement mit passivierender schutzschicht

Also Published As

Publication number Publication date
GB1193310A (en) 1970-05-28
NL6708915A (xx) 1968-01-02
FR1530053A (fr) 1968-06-21

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