MY184622A - A pressure sensor with magnetic nanoparticles - Google Patents

A pressure sensor with magnetic nanoparticles

Info

Publication number
MY184622A
MY184622A MYPI2013702271A MYPI2013702271A MY184622A MY 184622 A MY184622 A MY 184622A MY PI2013702271 A MYPI2013702271 A MY PI2013702271A MY PI2013702271 A MYPI2013702271 A MY PI2013702271A MY 184622 A MY184622 A MY 184622A
Authority
MY
Malaysia
Prior art keywords
pressure sensor
magnetic nanoparticles
conductive electrodes
diaphragm
electrical conductivity
Prior art date
Application number
MYPI2013702271A
Inventor
Bien Chia Seng Daniel
Nabipoor Mohsen
Aun Shih Teh
Wai Yee Lee
Hing Wah Lee
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Priority to MYPI2013702271A priority Critical patent/MY184622A/en
Priority to PCT/MY2014/000113 priority patent/WO2015080548A1/en
Publication of MY184622A publication Critical patent/MY184622A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The present invention relates to a piezoresistive pressure sensor which detects applied pressure by measuring the change of electrical conductivity of the magnetic nanoparticles (3) in response to the application of mechanical stress onto the diaphragm (1). The pressure sensor comprises conductive electrodes (2) formed on the diaphragm (1) which is provided on a substrate (4). Magnetic nanoparticles (3) are deposited on the conductive electrodes (2) for electrically connecting the conductive electrodes (2) and changing electrical conductivity when stress is applied.
MYPI2013702271A 2013-11-26 2013-11-26 A pressure sensor with magnetic nanoparticles MY184622A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
MYPI2013702271A MY184622A (en) 2013-11-26 2013-11-26 A pressure sensor with magnetic nanoparticles
PCT/MY2014/000113 WO2015080548A1 (en) 2013-11-26 2014-05-26 A pressure sensor with magnetic nanoparticles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI2013702271A MY184622A (en) 2013-11-26 2013-11-26 A pressure sensor with magnetic nanoparticles

Publications (1)

Publication Number Publication Date
MY184622A true MY184622A (en) 2021-04-09

Family

ID=51542417

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2013702271A MY184622A (en) 2013-11-26 2013-11-26 A pressure sensor with magnetic nanoparticles

Country Status (2)

Country Link
MY (1) MY184622A (en)
WO (1) WO2015080548A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102693548B1 (en) * 2022-01-06 2024-08-12 국방과학연구소 Graphene channel comprising graphene layer and graphene nanoparticle layer, biosensor wearable device including the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001524212A (en) * 1997-03-24 2001-11-27 インテグレーテッド マイクロマシーンズ，インコーポレーテッド Batch assembled semiconductor thin film pressure sensor and method of manufacturing the same
US6889555B1 (en) 1999-07-20 2005-05-10 Fidelica Microsystems, Inc. Magnetoresistive semiconductor pressure sensors and fingerprint identification/verification sensors using same
US7318351B2 (en) * 2005-10-05 2008-01-15 Honeywell International Inc. Pressure sensor
US7553681B2 (en) 2006-03-24 2009-06-30 Intel Corporation Carbon nanotube-based stress sensor
US8669952B2 (en) 2011-06-09 2014-03-11 Sharp Laboratories Of America, Inc. Metallic nanoparticle pressure sensor

Also Published As

Publication number Publication date
WO2015080548A1 (en) 2015-06-04

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