MY173650A - Humidity sensor and a method for fabricating the same - Google Patents
Humidity sensor and a method for fabricating the sameInfo
- Publication number
- MY173650A MY173650A MYPI2010005362A MYPI2010005362A MY173650A MY 173650 A MY173650 A MY 173650A MY PI2010005362 A MYPI2010005362 A MY PI2010005362A MY PI2010005362 A MYPI2010005362 A MY PI2010005362A MY 173650 A MY173650 A MY 173650A
- Authority
- MY
- Malaysia
- Prior art keywords
- humidity
- fabricating
- humidity sensor
- substrate
- membrane
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The present invention relates to a sensor for determining humidity. A humidity sensor (30) comprises of a substrate (32); a bottom membrane (34) positioned above the substrate (32) and a top membrane (36) positioned above the bottom membrane (34) forming a dielectric layer (38); and a plurality of inter-digitated electrodes (40) with changing capacitance in accordance to change in humidity detected by the dielectric layer (38) embedded to the top membrane (36) wherein a plurality of trenches (42) are embedded to the bottom membrane (34) or to the substrate (32) thereby increasing area of exposure to humidity. The present invention also relates to a method for fabricating a humidity sensor.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MYPI2010005362A MY173650A (en) | 2010-11-15 | 2010-11-15 | Humidity sensor and a method for fabricating the same |
PCT/MY2011/000136 WO2012067488A1 (en) | 2010-11-15 | 2011-06-23 | Humidity sensor and a method for fabricating the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MYPI2010005362A MY173650A (en) | 2010-11-15 | 2010-11-15 | Humidity sensor and a method for fabricating the same |
Publications (1)
Publication Number | Publication Date |
---|---|
MY173650A true MY173650A (en) | 2020-02-13 |
Family
ID=46084250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI2010005362A MY173650A (en) | 2010-11-15 | 2010-11-15 | Humidity sensor and a method for fabricating the same |
Country Status (2)
Country | Link |
---|---|
MY (1) | MY173650A (en) |
WO (1) | WO2012067488A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014185771A2 (en) | 2013-05-17 | 2014-11-20 | Mimos Berhad | A capacitive humidity sensor |
WO2016056887A1 (en) * | 2014-10-09 | 2016-04-14 | Mimos Berhad | Humidity sensor with nanoporous polyimide membranes and a method of fabrication thereof |
WO2020008935A1 (en) * | 2018-07-04 | 2020-01-09 | 株式会社村田製作所 | Humidity sensor, and rfid tag comprising same |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100965835B1 (en) * | 2007-09-18 | 2010-06-28 | 전자부품연구원 | Fabricating method for capacitor type polymer sensor for measuring humidity and the same |
MY164505A (en) * | 2007-11-23 | 2017-12-29 | Mimos Berhad | Capacitive sensor |
CN102150038B (en) * | 2008-09-11 | 2014-03-19 | Nxp股份有限公司 | Sensor with combined in-plane and parallel-plane configuration |
-
2010
- 2010-11-15 MY MYPI2010005362A patent/MY173650A/en unknown
-
2011
- 2011-06-23 WO PCT/MY2011/000136 patent/WO2012067488A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2012067488A1 (en) | 2012-05-24 |
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