MY164875A - Isotopically-enriched boron-containing compounds, and methods of making and using same - Google Patents

Isotopically-enriched boron-containing compounds, and methods of making and using same

Info

Publication number
MY164875A
MY164875A MYPI2013000502A MYPI2013000502A MY164875A MY 164875 A MY164875 A MY 164875A MY PI2013000502 A MYPI2013000502 A MY PI2013000502A MY PI2013000502 A MYPI2013000502 A MY PI2013000502A MY 164875 A MY164875 A MY 164875A
Authority
MY
Malaysia
Prior art keywords
boron
isotopically
methods
making
same
Prior art date
Application number
MYPI2013000502A
Inventor
Robert Kaim
Joseph D Sweeney
Oleg Byl
Sharad N Yedave
Edward E Jones
Peng Zou
Ying Tang
Barry Lewis Chambers
Richard S Ray
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US12/913,721 external-priority patent/US8138071B2/en
Priority claimed from US13/048,367 external-priority patent/US8062965B2/en
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of MY164875A publication Critical patent/MY164875A/en

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  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)

Abstract

AN ISOTOPICALLY-ENRICHED, BORON-CONTAINING COMPOUND COMPRISING TWO OR MORE BORON ATOMS AND AT LEAST ONE FLUORINE ATOM, WHEREIN AT LEAST ONE OF THE BORON ATOMS CONTAINS A DESIRED ISOTOPE OF BORON IN A CONCENTRATION OR RATIO GREATER THAN A NATURAL ABUNDANCE CONCENTRATION OR RATIO THEREOF. THE COMPOUND MAY HAVE A CHEMICAL FORMULA OF B2F4. SYNTHESIS METHODS FOR SUCH COMPOUNDS, AND ION IMPLANTATION METHODS USING SUCH COMPOUNDS, ARE DESCRIBED, AS WELL AS STORAGE AND DISPENSING VESSELS IN WHICH THE ISOTOPICALLY-ENRICHED, BORON-CONTAINING COMPOUND IS ADVANTAGEOUSLY CONTAINED FOR SUBSEQUENT DISPENSING USE.
MYPI2013000502A 2010-08-30 2011-08-16 Isotopically-enriched boron-containing compounds, and methods of making and using same MY164875A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US37835310P 2010-08-30 2010-08-30
US12/913,721 US8138071B2 (en) 2009-10-27 2010-10-27 Isotopically-enriched boron-containing compounds, and methods of making and using same
US13/048,367 US8062965B2 (en) 2009-10-27 2011-03-15 Isotopically-enriched boron-containing compounds, and methods of making and using same

Publications (1)

Publication Number Publication Date
MY164875A true MY164875A (en) 2018-01-30

Family

ID=62118172

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2013000502A MY164875A (en) 2010-08-30 2011-08-16 Isotopically-enriched boron-containing compounds, and methods of making and using same

Country Status (1)

Country Link
MY (1) MY164875A (en)

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