MY161431A - A method for eliminating aluminium surface defects - Google Patents
A method for eliminating aluminium surface defectsInfo
- Publication number
- MY161431A MY161431A MYPI2013003677A MYPI2013003677A MY161431A MY 161431 A MY161431 A MY 161431A MY PI2013003677 A MYPI2013003677 A MY PI2013003677A MY PI2013003677 A MYPI2013003677 A MY PI2013003677A MY 161431 A MY161431 A MY 161431A
- Authority
- MY
- Malaysia
- Prior art keywords
- metal
- surface defects
- eliminating
- aluminium surface
- rinsing
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/24—Cleaning or pickling metallic material with solutions or molten salts with neutral solutions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
THE PRESENT INVENTION RELATES TO A METHOD FOR ELIMINATING ALUMINIUM SURFACE DEFECTS ON LARGE EXPOSED METAL COMPRISING: CONDUCTING A POST PAD ETCHING TREATMENT (100) ON THE METAL; COLD-RINSING THE METAL (200); AND DRYING THE METAL (300) USING NITROGEN; CHARACTERIZED IN THAT THE STEPS OF CONDUCTING A POST PAD ETCHING TREATMENT (100) ON THE METAL, COLD-RINSING THE METAL (200); AND DRYING THE METAL (300) USING NITROGEN INVOLVE CHEMICAL-FREE SOLVENT. THE PRESENT INVENTION IS ADVANTAGEOUS AS IT IS EFFECTIVE IN ELIMINATING THE WHITE HAZE EFFECT. THE ADVANTAGE OF USE OF DEIONIZED (DI) WATER ONLY CLEANING METHOD IS THAT IT IS MORE ENVIRONMENT-FRIENDLY. MOST ILLUSTRATIVE
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MYPI2013003677A MY161431A (en) | 2013-10-07 | 2013-10-07 | A method for eliminating aluminium surface defects |
PCT/MY2014/000139 WO2015053605A1 (en) | 2013-10-07 | 2014-05-30 | A method for eliminating aluminium surface defects |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MYPI2013003677A MY161431A (en) | 2013-10-07 | 2013-10-07 | A method for eliminating aluminium surface defects |
Publications (1)
Publication Number | Publication Date |
---|---|
MY161431A true MY161431A (en) | 2017-04-14 |
Family
ID=51589482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI2013003677A MY161431A (en) | 2013-10-07 | 2013-10-07 | A method for eliminating aluminium surface defects |
Country Status (2)
Country | Link |
---|---|
MY (1) | MY161431A (en) |
WO (1) | WO2015053605A1 (en) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW466545B (en) * | 2000-03-30 | 2001-12-01 | United Microelectronics Corp | Method for removing pad nodule |
TWI242805B (en) * | 2001-02-15 | 2005-11-01 | United Microelectronics Corp | Post metal etch cleaning method |
US7585754B2 (en) * | 2008-01-10 | 2009-09-08 | Winbond Electronics Corp. | Method of forming bonding pad opening |
CN103077880B (en) * | 2012-07-25 | 2015-09-30 | 上海华力微电子有限公司 | A kind of process of the titanium nitride residue processed on aluminium welding pad |
MY181531A (en) * | 2013-01-18 | 2020-12-25 | Mimos Berhad | Method of fabricating a bond pad in a semiconductor device |
-
2013
- 2013-10-07 MY MYPI2013003677A patent/MY161431A/en unknown
-
2014
- 2014-05-30 WO PCT/MY2014/000139 patent/WO2015053605A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2015053605A1 (en) | 2015-04-16 |
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