MY158140A - Nanostructured sensing device and method of fabricating same - Google Patents

Nanostructured sensing device and method of fabricating same

Info

Publication number
MY158140A
MY158140A MYPI2011003250A MYPI2011003250A MY158140A MY 158140 A MY158140 A MY 158140A MY PI2011003250 A MYPI2011003250 A MY PI2011003250A MY PI2011003250 A MYPI2011003250 A MY PI2011003250A MY 158140 A MY158140 A MY 158140A
Authority
MY
Malaysia
Prior art keywords
sensing device
fabricating same
sensing elements
support structure
resistor structure
Prior art date
Application number
MYPI2011003250A
Inventor
Bt Abdul Aziz Anees
Bien Chia Sheng Daniel
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Priority to MYPI2011003250A priority Critical patent/MY158140A/en
Priority to PCT/MY2012/000145 priority patent/WO2013009163A1/en
Publication of MY158140A publication Critical patent/MY158140A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00007—Assembling automatically hinged components, i.e. self-assembly processes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128—Microapparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0214—Biosensors; Chemical sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0109—Bridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/019—Suspended structures, i.e. structures allowing a movement characterized by their profile

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

THE PRESENT INVENTION RELATES GENERALLY TO A NANOSTRUCTURED SENSING DEVICE COMPRISES OF A SUPPORT STRUCTURE (101), AT LEAST ONE SUSPENDED RESISTOR STRUCTURE (103) WHICH IS FORMED PERPENDICULAR TO SAID SUPPORT STRUCTURE (101) AND A PLURALITY OF SENSING ELEMENTS (209) BEING ASSEMBLED ONTO SAID RESISTOR STRUCTURE (103), WHEREIN SAID RESISTOR STRUCTURE (103) IS ANCHORED TO SAID SUPPORT STRUCTURE (101) VIA AT LEAST ONE HINGE PAD (105). SAID SENSING DEVICE OF THE PRESENT INVENTION CAN BE FABRICATED BY TWO DIFFERENT APPROACHES, EITHER SAID HINGE PAD (105) IS BEING DEPOSITED FIRST AND FOLLOWED BY THE GROW OF SAID PLURALITY OF SENSING ELEMENTS (209) ON BOTH TOP AND BOTTOM OF SAID RESISTOR STRUCTURE (103) OR SAID PLURALITY OF SENSING ELEMENTS (209) IS GROWN BEFORE SAID HINGE PAD (105) IS DEPOSITED. (THE MOST ILLUSTRATIVE
MYPI2011003250A 2011-07-11 2011-07-11 Nanostructured sensing device and method of fabricating same MY158140A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
MYPI2011003250A MY158140A (en) 2011-07-11 2011-07-11 Nanostructured sensing device and method of fabricating same
PCT/MY2012/000145 WO2013009163A1 (en) 2011-07-11 2012-06-25 Nanostructured sensing device and method of fabricating same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI2011003250A MY158140A (en) 2011-07-11 2011-07-11 Nanostructured sensing device and method of fabricating same

Publications (1)

Publication Number Publication Date
MY158140A true MY158140A (en) 2016-09-15

Family

ID=47506272

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2011003250A MY158140A (en) 2011-07-11 2011-07-11 Nanostructured sensing device and method of fabricating same

Country Status (2)

Country Link
MY (1) MY158140A (en)
WO (1) WO2013009163A1 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100906496B1 (en) * 2007-07-27 2009-07-08 (주)엠투엔 Gas sensor and method for manufacturing the same

Also Published As

Publication number Publication date
WO2013009163A1 (en) 2013-01-17

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