MY155536A - Nozzle clog detector/measurer and electronic component inspection apparatus provided with same - Google Patents

Nozzle clog detector/measurer and electronic component inspection apparatus provided with same

Info

Publication number
MY155536A
MY155536A MYPI2014700923A MYPI2014700923A MY155536A MY 155536 A MY155536 A MY 155536A MY PI2014700923 A MYPI2014700923 A MY PI2014700923A MY PI2014700923 A MYPI2014700923 A MY PI2014700923A MY 155536 A MY155536 A MY 155536A
Authority
MY
Malaysia
Prior art keywords
nozzle
flow rate
electronic component
detector
rate detector
Prior art date
Application number
MYPI2014700923A
Inventor
Kozaki Yoshihiro
Original Assignee
Ueno Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ueno Seiki Co Ltd filed Critical Ueno Seiki Co Ltd
Priority to MYPI2014700923A priority Critical patent/MY155536A/en
Publication of MY155536A publication Critical patent/MY155536A/en

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  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The present disclosure relates to a detector/measurer unit that detects a clogging of a nozzle suctioning an electronic component or a semiconductor product by vacuum force, and an electronic component inspection apparatus including the same. A nozzle (V1) having completed a pre-process of a nozzle clog detection unit (10) stops at a stop position above a contact (22) of a flow rate detector (20) of the nozzle clog detection unit (10) along the vertical axis. The suction nozzle (V1) descends vertically from the stop position, and the internal flow channel of the nozzle (V1) and the tip flow channel of the flow rate detector (20) form a passage. Negative pressure is produced in the piping interior of the suction nozzle (V1), and air is caused to flow through the interior of the flow rate detector (20). The flow rate detector (20) causes a sensor unit (21) to measure the flow rate of air flowing the interior when the air is introduced. The measurement result by the sensor unit (21) is output to a controller (40) as detection data (A). A nozzle clog is detected based on the detection data (A) output by the sensor unit (21).
MYPI2014700923A 2011-10-21 2011-10-21 Nozzle clog detector/measurer and electronic component inspection apparatus provided with same MY155536A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MYPI2014700923A MY155536A (en) 2011-10-21 2011-10-21 Nozzle clog detector/measurer and electronic component inspection apparatus provided with same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI2014700923A MY155536A (en) 2011-10-21 2011-10-21 Nozzle clog detector/measurer and electronic component inspection apparatus provided with same

Publications (1)

Publication Number Publication Date
MY155536A true MY155536A (en) 2015-10-23

Family

ID=54780021

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2014700923A MY155536A (en) 2011-10-21 2011-10-21 Nozzle clog detector/measurer and electronic component inspection apparatus provided with same

Country Status (1)

Country Link
MY (1) MY155536A (en)

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