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Application filed by Grace W R & CofiledCriticalGrace W R & Co
Priority to MYPI20042824ApriorityCriticalpatent/MY153435A/en
Publication of MY153435ApublicationCriticalpatent/MY153435A/en
AN ABRASIVE COMPOSITION FOR POLISHING SUBSTRATES INCLUDING A PLURALITY OF ABRASIVE PARTICLES HAVING A POLYDISPERSE PARTICLE SIZE DISTRIBUTION WITH MEDIAN PARTICLE SIZE, BY VOLUME, BEING ABOUT 20 NANOMETERS TO ABOUT 100 NANOMETERS; A SPAN VALUE, BY VOLUME, BEING GREATER THAN OR EQUAL TO ABOUT 20 NANOMETERS, WHEREIN THE FRACTION OF PARTICLES GREATER THAN ABOUT 100 NANOMETERS IS LESS THAN OR EQUAL TO ABOUT 20% BY VOLUME OF THE ABRASIVE PARTICLES.
MYPI20042824A2004-07-152004-07-15Abrasive particles for chemical mechanical polishing
MY153435A
(en)
Macroporous abrasive article comprising macroporous structure substrate and coating that includes binder and abrasive aggregates formed from a composition of abrasive grit particles and nanoparticle binder, where the coating is partially embedded in the substrate; and methods.