MY152905A - Ion sources and methods of operating an electromagnet of an ion source - Google Patents

Ion sources and methods of operating an electromagnet of an ion source

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Publication number
MY152905A
MY152905A MYPI20093503A MY152905A MY 152905 A MY152905 A MY 152905A MY PI20093503 A MYPI20093503 A MY PI20093503A MY 152905 A MY152905 A MY 152905A
Authority
MY
Malaysia
Prior art keywords
ion
electromagnet
methods
magnetic field
plasma
Prior art date
Application number
Inventor
Alan V Hayes
Rustam Yevtukhov
Viktor Kanarov
Boris L Druz
Original Assignee
Veeco Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/678,979 external-priority patent/US7557362B2/en
Application filed by Veeco Instr Inc filed Critical Veeco Instr Inc
Publication of MY152905A publication Critical patent/MY152905A/en

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  • Electron Sources, Ion Sources (AREA)

Abstract

ION SOURCES AND METHODS OF OPERATING AN ELECTROMAGNET OF AN ION SOURCE FOR GENERATING AN ION BEAM WITH A CONTROLLABLE ION CURRENT DENSITY DISTRIBUTION. THE ION SOURCE (10) INCLUDES A DISCHARGE CHAMBER (16) AND AN ELECTROMAGNET (42; 42A-D) ADAPTED TO GENERATE A MAGNETIC FIELD (75) FOR CHANGING A PLASMA DENSITY DISTRIBUTION INSIDE THE DISCHARGE CHAMBER (16). THE METHODS MAY INCLUDE GENERATING PLASMA (17) IN THE DISCHARGE SPACE (24), GENERATING AND SHAPING A MAGNETIC FIELD (75) IN THE DISCHARGE SPACE (24) BY APPLYING A CURRENT TO AN ELECTROMAGNET (42; 42A-D) THAT IS EFFECTIVE TO DEFINE THE PLASMA DENSITY DISTRIBUTION, EXTRACTING AN ION BEAM (15) FROM THE PLASMA (17), MEASURING A DISTRIBUTION PROFILE FOR THE ION BEAM DENSITY, AND COMPARING THE ACTUAL DISTRIBUTION PROFILE WITH A DESIRED DISTRIBUTION PROFILE FOR THE ION BEAM DENSITY. BASED UPON THE COMPARISON, THE CURRENT APPLIED TO THE ELECTROMAGNET (42; 42A-D) MAY BE ADJUSTED TO MODIFY MAGNETIC FIELD (75) THE MAGNETIC FIELD IN THE DISCHARGE SPACE AND, THEREBY, ALTER THE PLASMA DENSITY DISTRIBUTION.
MYPI20093503 2007-02-26 2008-02-26 Ion sources and methods of operating an electromagnet of an ion source MY152905A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US89166907P 2007-02-26 2007-02-26
US11/678,979 US7557362B2 (en) 2004-02-04 2007-02-26 Ion sources and methods for generating an ion beam with a controllable ion current density distribution

Publications (1)

Publication Number Publication Date
MY152905A true MY152905A (en) 2014-11-28

Family

ID=52595833

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20093503 MY152905A (en) 2007-02-26 2008-02-26 Ion sources and methods of operating an electromagnet of an ion source

Country Status (1)

Country Link
MY (1) MY152905A (en)

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