MY137331A - Chemical mechanical polishing pad with micro-holes - Google Patents

Chemical mechanical polishing pad with micro-holes

Info

Publication number
MY137331A
MY137331A MYPI20030349A MY137331A MY 137331 A MY137331 A MY 137331A MY PI20030349 A MYPI20030349 A MY PI20030349A MY 137331 A MY137331 A MY 137331A
Authority
MY
Malaysia
Prior art keywords
micro
holes
polishing pad
mechanical polishing
chemical mechanical
Prior art date
Application number
Inventor
Park Inha
Kwon Tae-Kyoung
Kim Jaeseok
Original Assignee
Skc Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Skc Co Ltd filed Critical Skc Co Ltd
Priority to MYPI20030349 priority Critical patent/MY137331A/en
Publication of MY137331A publication Critical patent/MY137331A/en

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)

Abstract

DISCLOSED IS A CHEMICAL MECHANICAL POLISHING PAD @FORMED AT A POLISHING SURFACE THEREOF WITH MICRO-HOLES @EACH HAVING A DESIRED CROSS-SECTIONAL AREA WHILE HAVING @A DESIRED DEPTH. THE SHAPE, SIZE, AND DENSITY OF THE @MICRO-HOLES CAN BE OPTIONALLY ADJUSTED. THE CHEMICAL @MECHANICAL POLISHING PAD PROVIDES AN EFFECT OF @MAINTAINING A DESIRED POLISHING RATE DURING A POLISHING @PROCESS. IN ACCORDANCE WITH THE PRESENT INVENTION, THE @MICRO-HOLES CAN HAVE DIVERSE ARRANGEMENTS DEPENDING ON @GIVEN PROCESS CONDITIONS.
MYPI20030349 2003-01-31 2003-01-31 Chemical mechanical polishing pad with micro-holes MY137331A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MYPI20030349 MY137331A (en) 2003-01-31 2003-01-31 Chemical mechanical polishing pad with micro-holes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI20030349 MY137331A (en) 2003-01-31 2003-01-31 Chemical mechanical polishing pad with micro-holes

Publications (1)

Publication Number Publication Date
MY137331A true MY137331A (en) 2009-01-30

Family

ID=45689113

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20030349 MY137331A (en) 2003-01-31 2003-01-31 Chemical mechanical polishing pad with micro-holes

Country Status (1)

Country Link
MY (1) MY137331A (en)

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