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Application filed by Allied Signal IncfiledCriticalAllied Signal Inc
Priority to MYPI20013234priorityCriticalpatent/MY134012A/en
Publication of MY134012ApublicationCriticalpatent/MY134012A/en
Manufacture Of Macromolecular Shaped Articles
(AREA)
Abstract
A METHOD OF MAKING A DIELECTRIC FILM ON A SUBSTRATE FROM A COMPOSITION CONTAINING AN ORGANOHYDRIDOSILOXANE RESIN IS PRESENTED. THE ORGANOHYDRIDOSILOXANE RESINS HAVE A CAGE CONFORMATION. THE PROCESS OF MAKING A DIELECTRIC FILM INCLUDES FORMING A SOLUTION OF A SOLVENT AND THE ORGANOHYDRIDOSILOXANE RESIN, DISPENSING THE SOLUTION ON A SUBSTRATE, SPINNING THE SUBSTRATE, BAKING THE SUBSTRATE TO REMOVE THE SOLVENT, AND CURING THE SUBSTRATE TO FORM THE DIELECTRIC FILM. DIELECTRIC FILMS OF THE PRESENT INVENTION EXHIBIT DIELECTRIC CONSTANTS OF APPROXIMATELY 3 OR LOWER.
MYPI200132342001-07-062001-07-06Dielectric films from organohydridosiloxane resins with low organic content
MY134012A
(en)
Coating composition for insulating film production, preparation method of insulation film by using the same, insulation film for semi-conductor device prepared therefrom, and semi-conductor device comprising the same