MX9703726A - Sensor de presion absoluta capacitivo y metodo. - Google Patents
Sensor de presion absoluta capacitivo y metodo.Info
- Publication number
- MX9703726A MX9703726A MX9703726A MX9703726A MX9703726A MX 9703726 A MX9703726 A MX 9703726A MX 9703726 A MX9703726 A MX 9703726A MX 9703726 A MX9703726 A MX 9703726A MX 9703726 A MX9703726 A MX 9703726A
- Authority
- MX
- Mexico
- Prior art keywords
- substrate
- diaphragm
- capacitance
- pressure sensor
- absolute pressure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Un sensor de presion absoluta capacitiva incluye un sustrato que tiene un electrodo depositado en dicho substrato y un ensamble de diafragma colocado sobre el sustrato. Conforme se incrementa la presion, el diafragma se desvía, toca el electrodo (en el modo de tacto), y cambia la capacitancia del sensor. La capacitancia cambiada es detectada y por consiguiente se detectan los cambios de presion. Se emplea un paso enterrado para detectar el cambio de capacitancia en una cámara bajo el diafragma y se determina así la presion detectada. Se mantiene un vacío en la cámara mediante la seleccion adecuada de un espesor de un electrodo sensor y una capa aislante, la exposicion de la misma a un ciclo térmico, y la union hermética del ensamble de diafragma sobre el sustrato.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08343712 | 1994-11-22 | ||
| US08/343,712 US5528452A (en) | 1994-11-22 | 1994-11-22 | Capacitive absolute pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| MX9703726A true MX9703726A (es) | 1998-07-31 |
| MXPA97003726A MXPA97003726A (es) | 1998-11-09 |
Family
ID=
Also Published As
| Publication number | Publication date |
|---|---|
| PL320670A1 (en) | 1997-10-27 |
| CA2205169C (en) | 2002-10-15 |
| CA2205169A1 (en) | 1996-05-30 |
| JPH10509241A (ja) | 1998-09-08 |
| EP0818046B1 (en) | 2003-01-22 |
| BR9509747A (pt) | 1997-10-21 |
| RU2171455C2 (ru) | 2001-07-27 |
| EP0818046A4 (en) | 1998-12-02 |
| ES2118672T1 (es) | 1998-10-01 |
| DE69529477T2 (de) | 2003-07-31 |
| CN1172547A (zh) | 1998-02-04 |
| AU4158196A (en) | 1996-06-17 |
| US5528452A (en) | 1996-06-18 |
| DE69529477D1 (de) | 2003-02-27 |
| EP0818046A1 (en) | 1998-01-14 |
| DE818046T1 (de) | 1998-07-16 |
| WO1996016418A1 (en) | 1996-05-30 |
| EP1286147A1 (en) | 2003-02-26 |
| PL179139B1 (pl) | 2000-07-31 |
| AU686916B2 (en) | 1998-02-12 |
| KR100355421B1 (ko) | 2002-12-18 |
| KR987000672A (ko) | 1998-03-30 |
| US5585311A (en) | 1996-12-17 |
| CN1092836C (zh) | 2002-10-16 |
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