MX9605290A - Novel silicon carbide dummy wafer. - Google Patents

Novel silicon carbide dummy wafer.

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Publication number
MX9605290A
MX9605290A MX9605290A MX9605290A MX9605290A MX 9605290 A MX9605290 A MX 9605290A MX 9605290 A MX9605290 A MX 9605290A MX 9605290 A MX9605290 A MX 9605290A MX 9605290 A MX9605290 A MX 9605290A
Authority
MX
Mexico
Prior art keywords
silicon carbide
dummy wafer
novel silicon
carbide dummy
wafer
Prior art date
Application number
MX9605290A
Other languages
Spanish (es)
Other versions
MXPA96005290A (en
Inventor
Craig A Willkens
Normand P Arsenault
Original Assignee
Saint Gobain Norton Ind Cerami
Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Norton Ind Cerami, Corp filed Critical Saint Gobain Norton Ind Cerami
Publication of MX9605290A publication Critical patent/MX9605290A/en
Publication of MXPA96005290A publication Critical patent/MXPA96005290A/en

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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/62645—Thermal treatment of powders or mixtures thereof other than sintering
    • C04B35/62655—Drying, e.g. freeze-drying, spray-drying, microwave or supercritical drying
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Ceramic Products (AREA)
  • Inorganic Insulating Materials (AREA)

Abstract

The present invention relates to an unsiliconized or siliconized wafer consisting essentially of recrystallized silicon carbide, the wafer having a diameter of at least 150 mm and a thickness of between 0.5 and 2 mm, and having a porosity or free silicon content between 15 v/o and 43 v/o.
MXPA/A/1996/005290A 1995-03-01 1996-10-31 Novedosa rodaja falsa de carburo de sili MXPA96005290A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US39697095A 1995-03-01 1995-03-01
US396970 1995-03-01
PCT/US1996/002880 WO1996026910A1 (en) 1995-03-01 1996-02-28 Novel silicon carbide dummy wafer

Publications (2)

Publication Number Publication Date
MX9605290A true MX9605290A (en) 1997-10-31
MXPA96005290A MXPA96005290A (en) 1998-07-03

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Also Published As

Publication number Publication date
KR970702830A (en) 1997-06-10
EP0758310A1 (en) 1997-02-19
JP2000513689A (en) 2000-10-17
AU5180496A (en) 1996-09-18
CA2188290A1 (en) 1996-09-06
CN1147806A (en) 1997-04-16
BR9605818A (en) 1997-09-16
WO1996026910A1 (en) 1996-09-06
CZ321196A3 (en) 1997-04-16

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