MX9308187A - COATING METHODS THROUGH MENISCOS. - Google Patents

COATING METHODS THROUGH MENISCOS.

Info

Publication number
MX9308187A
MX9308187A MX9308187A MX9308187A MX9308187A MX 9308187 A MX9308187 A MX 9308187A MX 9308187 A MX9308187 A MX 9308187A MX 9308187 A MX9308187 A MX 9308187A MX 9308187 A MX9308187 A MX 9308187A
Authority
MX
Mexico
Prior art keywords
coating
coating material
methods
coated
objects
Prior art date
Application number
MX9308187A
Other languages
Spanish (es)
Inventor
Hendrik F Bok
Original Assignee
Specialty Coating Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Specialty Coating Systems Inc filed Critical Specialty Coating Systems Inc
Publication of MX9308187A publication Critical patent/MX9308187A/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/02—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material to surfaces by single means not covered by groups B05C1/00 - B05C7/00, whether or not also using other means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)

Abstract

Se describen métodos para recubrir superficies planas o curvas al hacerfluir un material de recubrimiento por medio de un aplicador poroso sobrela superficie del objeto que se va a recubrir. Los meniscos del materialde recubrimiento se mantienen entre el aplicador poroso y la superficiedel objeto que se va a recubrir mediante fuerzas de tracción entre elmaterial de recubrimiento y la superficie del objeto. Se pueden obtenerespesores de recubrimiento uniformes, delgados, por ejemplo menores deaproximadamente 1 micra, y recubrimientos de conformación de los objetosque tienen superficies irregulares. Los métodos son útiles, por ejemplo,para recubrir objetos tales como pantallas de panel planos, dispositivosópticos, microplaquetas de silicio y germanio, y tableros de circuitoshíbridos.Methods of coating flat or curved surfaces are described by flowing a coating material by means of a porous applicator onto the surface of the object to be coated. The menisci of the coating material are held between the porous applicator and the surface of the object to be coated by tensile forces between the coating material and the surface of the object. Thin, uniform coating thicknesses, for example less than about 1 micron, and conformal coatings can be obtained from objects that have uneven surfaces. The methods are useful, for example, for coating objects such as flat panel displays, optical devices, silicon and germanium chips, and hybrid circuit boards.

MX9308187A 1992-12-18 1993-12-17 COATING METHODS THROUGH MENISCOS. MX9308187A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/993,315 US5270079A (en) 1992-12-18 1992-12-18 Methods of meniscus coating

Publications (1)

Publication Number Publication Date
MX9308187A true MX9308187A (en) 1995-01-31

Family

ID=25539377

Family Applications (1)

Application Number Title Priority Date Filing Date
MX9308187A MX9308187A (en) 1992-12-18 1993-12-17 COATING METHODS THROUGH MENISCOS.

Country Status (6)

Country Link
US (1) US5270079A (en)
EP (1) EP0603007B1 (en)
JP (1) JP2987797B2 (en)
CA (1) CA2111795C (en)
DE (1) DE69303149T2 (en)
MX (1) MX9308187A (en)

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US5358750A (en) * 1990-12-14 1994-10-25 Scapa Group Plc Industrial fabrics
US5650196A (en) * 1993-05-05 1997-07-22 Steag Microtech Gmbh Device for coating substrates in semiconductor production
KR0128813B1 (en) * 1993-05-27 1998-04-04 기타지마 요시토시 Method and apparatus for applicatin of liquid
US5688324A (en) * 1994-07-15 1997-11-18 Dainippon Screen Mfg. Co., Ltd. Apparatus for coating substrate
US5545440A (en) * 1994-12-05 1996-08-13 At&T Global Information Solutions Company (Aka Ncr Corporation) Method and apparatus for polymer coating of substrates
US5601655A (en) * 1995-02-14 1997-02-11 Bok; Hendrik F. Method of cleaning substrates
US5902399A (en) * 1995-07-27 1999-05-11 Micron Technology, Inc. Method and apparatus for improved coating of a semiconductor wafer
US5935653A (en) * 1996-01-18 1999-08-10 Micron Technology, Inc. Methods for coating a substrate
US5900273A (en) * 1996-01-19 1999-05-04 Micron Technology, Inc. Method for coating a substrate covered with a plurality of spacer members
US6117294A (en) 1996-01-19 2000-09-12 Micron Technology, Inc. Black matrix material and methods related thereto
US5762773A (en) 1996-01-19 1998-06-09 Micron Display Technology, Inc. Method and system for manufacture of field emission display
US5858459A (en) * 1996-02-22 1999-01-12 Micron Technology, Inc. Cassette invertor apparatus and method
US5695833A (en) * 1996-06-12 1997-12-09 Bok; Hendrik F. Method for uniform film coating of substrates
US6039059A (en) 1996-09-30 2000-03-21 Verteq, Inc. Wafer cleaning system
TW418116B (en) * 1997-11-04 2001-01-11 Matsushita Electric Ind Co Ltd Water-repellent coating and coating device
US5869219A (en) * 1997-11-05 1999-02-09 Taiwan Semiconductor Manufacturing Co. Ltd. Method for depositing a polyimide film
CA2270807A1 (en) 1999-05-03 2000-11-03 Ibm Canada Limited-Ibm Canada Limitee Closed chamber method and apparatus for the coating of liquid films
US6593690B1 (en) * 1999-09-03 2003-07-15 3M Innovative Properties Company Large area organic electronic devices having conducting polymer buffer layers and methods of making same
US7122126B1 (en) * 2000-09-28 2006-10-17 Materials And Technologies Corporation Wet processing using a fluid meniscus, apparatus and method
JP2001113214A (en) * 1999-10-19 2001-04-24 Casio Comput Co Ltd Formation method and formation apparatus for thin film
US6528117B2 (en) 2001-01-19 2003-03-04 Paul Lewis Method for coating a substance on one side of a substrate using a single miniscus
DE10139923A1 (en) * 2001-08-14 2003-03-06 Inductotherm Coating Equipment Method and device for molten coating
WO2005093788A1 (en) * 2004-03-22 2005-10-06 Rena Sondermaschinen Gmbh Method for the treatment of substrate surfaces
TWI352628B (en) * 2006-07-21 2011-11-21 Akrion Technologies Inc Nozzle for use in the megasonic cleaning of substr
JP2008036536A (en) * 2006-08-07 2008-02-21 Nippon Densan Corp Method of applying oil repellent agent solution for coating
DK2073939T3 (en) * 2006-10-16 2012-10-22 Materials And Technologies Corp Wet processing device using a fluid meniscus
DE102007033226A1 (en) 2007-07-17 2009-01-22 Kosub, Johann Aerodynamic centrifugal method for coating of fluid layers in constructing single wafer system, involves positioning centrically punched disk over rotatably supported wafer
CN102007081A (en) * 2008-02-22 2011-04-06 材料及技术公司 Single-sided high throughput wet etching and wet processing apparatus and method
EP2397230B1 (en) * 2009-02-16 2014-10-01 Osaka University Device for producing particle film and method for producing particle film
US9131885B2 (en) * 2009-07-02 2015-09-15 Dexcom, Inc. Analyte sensors and methods of manufacturing same
JP5444300B2 (en) 2011-09-26 2014-03-19 株式会社東芝 Coating device
KR20150058860A (en) * 2013-11-21 2015-05-29 한국기계연구원 Nano particle coating apparatus for large area substrate
JP6272138B2 (en) * 2014-05-22 2018-01-31 東京エレクトロン株式会社 Application processing equipment
JP5897749B1 (en) * 2015-03-18 2016-03-30 株式会社東芝 Coating method and coating apparatus
JP6239548B2 (en) 2015-03-18 2017-11-29 株式会社東芝 Coating apparatus and coating method
DE102016210883A1 (en) 2016-06-17 2017-12-21 Singulus Technologies Ag Apparatus and method for treating substrates using a porous material support roll

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US1289507A (en) * 1917-12-06 1918-12-31 Barrett Co Method and apparatus for treating coated roofing materials.
DE1071906B (en) * 1956-03-12 1959-12-24 Societc Anonyme des Manufactures des Glaces et Produits Chimiques de Saint-Gobain, Chaumy S. Cirey, Paris Process for coating glass objects with glaze-like coatings that are to be burned in
US3294576A (en) * 1963-01-14 1966-12-27 First Safe Deposit Nat Bank Of Method of producing printed circuit structures
US3429741A (en) * 1965-06-11 1969-02-25 Eastman Kodak Co Method of coating using a bead coater
US3367791A (en) * 1966-07-11 1968-02-06 Addressograph Multigraph Liquid development of electrostatic images
US3589975A (en) * 1967-03-23 1971-06-29 Reynolds Metals Co Composite sheet of plastic and metallic material and method of making the same
US3473955A (en) * 1967-05-05 1969-10-21 Eastman Kodak Co Coating process
US3535157A (en) * 1967-12-18 1970-10-20 Shipley Co Method of coating printed circuit board having through-holes
GB1246749A (en) * 1968-08-22 1971-09-15 Asahi Glass Co Ltd Method of and apparatus for coating glass surfaces
US4004045A (en) * 1974-08-09 1977-01-18 Stelter Manfred K Method for fluid film application
US4082868A (en) * 1976-03-18 1978-04-04 Armco Steel Corporation Method for continuously contact-coating one side only of a ferrous base metal strip with a molten coating metal
US4154193A (en) * 1976-11-16 1979-05-15 Tokyo Shibaura Electric Co., Ltd. Glass frit mixture coating apparatus
US4370356A (en) * 1981-05-20 1983-01-25 Integrated Technologies, Inc. Method of meniscus coating
US4676404A (en) * 1983-10-17 1987-06-30 Nippon Zeon Co., Ltd. Method and apparatus for feeding drug liquid from hermetic returnable can
DE69020634T2 (en) * 1989-04-21 1996-04-04 Idemitsu Kosan Co Manufacturing method for a substrate coated with a film of liquid crystalline material, and method and apparatus for manufacturing an optical device with a liquid crystal.

Also Published As

Publication number Publication date
DE69303149T2 (en) 1997-01-30
DE69303149D1 (en) 1996-07-18
US5270079A (en) 1993-12-14
JPH06206027A (en) 1994-07-26
CA2111795A1 (en) 1994-06-19
CA2111795C (en) 1999-12-07
EP0603007B1 (en) 1996-06-12
JP2987797B2 (en) 1999-12-06
EP0603007A1 (en) 1994-06-22

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Legal Events

Date Code Title Description
FG Grant or registration
MM Annulment or lapse due to non-payment of fees