MX364941B - Técnicas de diseño óptico para dispositivos de película delgada de múltiples capas en sistemas ópticos compactos. - Google Patents

Técnicas de diseño óptico para dispositivos de película delgada de múltiples capas en sistemas ópticos compactos.

Info

Publication number
MX364941B
MX364941B MX2016017255A MX2016017255A MX364941B MX 364941 B MX364941 B MX 364941B MX 2016017255 A MX2016017255 A MX 2016017255A MX 2016017255 A MX2016017255 A MX 2016017255A MX 364941 B MX364941 B MX 364941B
Authority
MX
Mexico
Prior art keywords
ice device
ice
device model
thin film
multilayer thin
Prior art date
Application number
MX2016017255A
Other languages
English (en)
Other versions
MX2016017255A (es
Inventor
l perkins David
michael jones Christopher
Original Assignee
Halliburton Energy Services Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Halliburton Energy Services Inc filed Critical Halliburton Energy Services Inc
Publication of MX2016017255A publication Critical patent/MX2016017255A/es
Publication of MX364941B publication Critical patent/MX364941B/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0278—Control or determination of height or angle information for sensors or receivers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Mathematical Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Laminated Bodies (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

Se proporcionan métodos y sistemas para diseñar un dispositivo de elementos informáticos integrados (ICE). El método incluye generar múltiples modelos de dispositivos de ICE con un conjunto de diseño, donde cada modelo de dispositivo de ICE se configura para detectar una característica de interés de una muestra, e incluye una o más capas. Determinar adicionalmente al menos un espectro de transmisión para cada modelo de dispositivo de ICE teórico para al menos una distribución de ángulos de luz incidente y al menos un criterio de rendimiento para cada modelo de dispositivo de ICE para la al menos una distribución de ángulos de luz incidente. A su vez, clasificar el modelo de dispositivo de ICE en función de al menos un criterio de rendimiento de cada modelo de dispositivo de ICE en la al menos una distribución de ángulos de luz incidente, y seleccionar para su fabricación uno o más modelos de dispositivos de ICE en función de una tolerancia angular favorable. También se proporciona un sistema óptico que incluye un dispositivo de ICE tal como se describió anteriormente.
MX2016017255A 2014-07-28 2014-07-28 Técnicas de diseño óptico para dispositivos de película delgada de múltiples capas en sistemas ópticos compactos. MX364941B (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2014/048370 WO2016018206A1 (en) 2014-07-28 2014-07-28 Optical design techniques for multilayer thin film devices in compact optical systems

Publications (2)

Publication Number Publication Date
MX2016017255A MX2016017255A (es) 2017-04-25
MX364941B true MX364941B (es) 2019-05-15

Family

ID=55217933

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2016017255A MX364941B (es) 2014-07-28 2014-07-28 Técnicas de diseño óptico para dispositivos de película delgada de múltiples capas en sistemas ópticos compactos.

Country Status (6)

Country Link
US (1) US9513163B2 (es)
EP (1) EP2992381B1 (es)
BR (1) BR112016029213A2 (es)
MX (1) MX364941B (es)
SA (1) SA516380575B1 (es)
WO (1) WO2016018206A1 (es)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9784671B2 (en) * 2013-12-20 2017-10-10 Halliburton Energy Services, Inc. Parallel optical thin film measurement system for analyzing multianalytes
WO2016018206A1 (en) 2014-07-28 2016-02-04 Halliburton Energy Services, Inc. Optical design techniques for multilayer thin film devices in compact optical systems
US10429240B2 (en) * 2016-07-29 2019-10-01 Viavi Solutions Inc. Transfer of a calibration model using a sparse transfer set
US20220154339A1 (en) * 2020-11-19 2022-05-19 Korea Institute Of Science And Technology Thin film deposition apparatus mountable with analysis system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7196793B2 (en) 2001-09-06 2007-03-27 Horiba, Ltd. Method for analyzing thin-film layer structure using spectroscopic ellipsometer
US7338637B2 (en) * 2003-01-31 2008-03-04 Hewlett-Packard Development Company, L.P. Microfluidic device with thin-film electronic devices
US6859323B1 (en) * 2003-12-11 2005-02-22 Optical Coating Laboratory, Inc. Dichroic neutral density optical filter
JP2008020563A (ja) * 2006-07-11 2008-01-31 Murakami Corp 誘電体多層膜フィルタ
ATE541230T1 (de) * 2007-04-25 2012-01-15 Omnivision Cdm Optics Inc Verfahren zum design von mehrlagigen optischen filtern
US9019501B2 (en) * 2012-04-26 2015-04-28 Halliburton Energy Services, Inc. Methods and devices for optically determining a characteristic of a substance
US9658149B2 (en) 2012-04-26 2017-05-23 Halliburton Energy Services, Inc. Devices having one or more integrated computational elements and methods for determining a characteristic of a sample by computationally combining signals produced therewith
WO2016018206A1 (en) 2014-07-28 2016-02-04 Halliburton Energy Services, Inc. Optical design techniques for multilayer thin film devices in compact optical systems

Also Published As

Publication number Publication date
EP2992381A4 (en) 2016-05-11
MX2016017255A (es) 2017-04-25
EP2992381A1 (en) 2016-03-09
BR112016029213A2 (pt) 2017-08-22
SA516380575B1 (ar) 2019-05-21
WO2016018206A1 (en) 2016-02-04
US20160265971A1 (en) 2016-09-15
US9513163B2 (en) 2016-12-06
EP2992381B1 (en) 2018-08-22

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