MX2015016988A - Porta-especimenes para microscopia electronica de barrido (meb) y microscopia de fuerza atomica (mfa). - Google Patents

Porta-especimenes para microscopia electronica de barrido (meb) y microscopia de fuerza atomica (mfa).

Info

Publication number
MX2015016988A
MX2015016988A MX2015016988A MX2015016988A MX2015016988A MX 2015016988 A MX2015016988 A MX 2015016988A MX 2015016988 A MX2015016988 A MX 2015016988A MX 2015016988 A MX2015016988 A MX 2015016988A MX 2015016988 A MX2015016988 A MX 2015016988A
Authority
MX
Mexico
Prior art keywords
microscopy
afm
sem
scanning electron
sample holder
Prior art date
Application number
MX2015016988A
Other languages
English (en)
Other versions
MX364380B (es
Inventor
Leyte Guerrero Florentino
Sadott Pacheco Y Alcalá Ubaldo
Velázquez Cruz David
Mabel Acosta Garate Galicia
Original Assignee
Inst Mexicano Del Petróleo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inst Mexicano Del Petróleo filed Critical Inst Mexicano Del Petróleo
Priority to MX2015016988A priority Critical patent/MX364380B/es
Priority to US15/374,969 priority patent/US10026587B2/en
Publication of MX2015016988A publication Critical patent/MX2015016988A/es
Publication of MX364380B publication Critical patent/MX364380B/es

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/20—Sample handling devices or methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/282—Determination of microscope properties
    • H01J2237/2826—Calibration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

La presente invención se refiere a un porta-espécimen (PE) compacto, fácil de utilizar y capaz de analizar una misma muestra tanto por microscopia de fuerza atómica (MFA) como por microscopia electrónica de barrido(MEB), manteniendo la referencia de posición de detalles para las dos microscopías, de manera que satisfaga los requerimientos de tamaño, conductividad, magnetización, limpieza, referenciación y adaptabilidad. La capacidad de mantener la referencia de posición de detalles para las dos microscopías en el ámbito de la microscopia correlacional resulta indispensable para obtener imágenes en ambos campos de la microscopía, que se puedan correlacionar y obtener información complementaria.
MX2015016988A 2015-12-10 2015-12-10 Porta-especimenes para microscopia electronica de barrido (meb) y microscopia de fuerza atomica (mfa). MX364380B (es)

Priority Applications (2)

Application Number Priority Date Filing Date Title
MX2015016988A MX364380B (es) 2015-12-10 2015-12-10 Porta-especimenes para microscopia electronica de barrido (meb) y microscopia de fuerza atomica (mfa).
US15/374,969 US10026587B2 (en) 2015-12-10 2016-12-09 Sample holder for scanning electron microscopy (SEM) and atomic force microscopy (AFM)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MX2015016988A MX364380B (es) 2015-12-10 2015-12-10 Porta-especimenes para microscopia electronica de barrido (meb) y microscopia de fuerza atomica (mfa).

Publications (2)

Publication Number Publication Date
MX2015016988A true MX2015016988A (es) 2017-06-09
MX364380B MX364380B (es) 2019-04-24

Family

ID=59020080

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2015016988A MX364380B (es) 2015-12-10 2015-12-10 Porta-especimenes para microscopia electronica de barrido (meb) y microscopia de fuerza atomica (mfa).

Country Status (2)

Country Link
US (1) US10026587B2 (es)
MX (1) MX364380B (es)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6879078B2 (ja) * 2016-08-22 2021-06-02 住友金属鉱山株式会社 走査型プローブ顕微鏡を用いた試料の測定方法および走査型プローブ顕微鏡用試料ホルダー
US10571433B2 (en) * 2016-11-04 2020-02-25 Sonix, Inc. Adjustable fixture for scanning acoustic microscopy
CN112189249B (zh) * 2018-05-15 2024-05-07 株式会社日立高新技术 电荷粒子线装置、试样加工方法和观察方法
US11557456B2 (en) 2018-09-14 2023-01-17 University Of Connecticut Real-time direct measurement of mechanical properties in-situ of scanning beam microscope
JP1688745S (es) * 2020-10-26 2021-06-28

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7230719B2 (en) * 2003-12-02 2007-06-12 National University Of Singapore High sensitivity scanning probe system

Also Published As

Publication number Publication date
US10026587B2 (en) 2018-07-17
MX364380B (es) 2019-04-24
US20170169989A1 (en) 2017-06-15

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