Latvijas Universitātes Cietvielu Fizikas Institūts
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Priority to LVP-20-40ApriorityCriticalpatent/LV15606B/en
Publication of LV15606ApublicationCriticalpatent/LV15606A/en
Publication of LV15606BpublicationCriticalpatent/LV15606B/en
The invention relates to devices for making vacuum coatings. The proposed magnetron sputtering device is adapted to be inserted into a vacuum chamber and comprises two magnetrons mounted on a magnetron holder, each on its own axis of rotation, which is inserted in a guide adapted to fix the magnetrons therein by means of fixation means, thus, the device is adapted to move and fix the magnetrons by optionally changing the distances between the magnetrons and from the magnetrons to the surface to be coated and their angular position to each other or to the surface to be coated, thus adjusting the spraying conditions of the coating to be made.
LVP-20-40A2020-05-152020-05-15Device for vacuum sputtering coating
LV15606B
(en)