LU64019A1 - - Google Patents

Info

Publication number
LU64019A1
LU64019A1 LU64019DA LU64019A1 LU 64019 A1 LU64019 A1 LU 64019A1 LU 64019D A LU64019D A LU 64019DA LU 64019 A1 LU64019 A1 LU 64019A1
Authority
LU
Luxembourg
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of LU64019A1 publication Critical patent/LU64019A1/xx

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/24Curved surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
LU64019D 1970-10-08 1971-10-06 LU64019A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE1361770A SE351304B (de) 1970-10-08 1970-10-08

Publications (1)

Publication Number Publication Date
LU64019A1 true LU64019A1 (de) 1972-04-12

Family

ID=20297693

Family Applications (1)

Application Number Title Priority Date Filing Date
LU64019D LU64019A1 (de) 1970-10-08 1971-10-06

Country Status (8)

Country Link
AT (1) AT315212B (de)
BE (1) BE773716A (de)
DE (1) DE2149687A1 (de)
FR (1) FR2111098A5 (de)
GB (1) GB1376610A (de)
LU (1) LU64019A1 (de)
NL (1) NL7113586A (de)
SE (1) SE351304B (de)

Also Published As

Publication number Publication date
DE2149687A1 (de) 1972-04-13
AT315212B (de) 1974-05-10
NL7113586A (de) 1972-04-11
SE351304B (de) 1972-11-20
GB1376610A (en) 1974-12-11
BE773716A (fr) 1972-01-31
FR2111098A5 (de) 1972-06-02

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