Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/67005—Apparatus not specifically provided for elsewhere
  • H01L21/67011—Apparatus for manufacture or treatment
  • H01L21/67098—Apparatus for thermal treatment
  • H01L21/67115—Apparatus for thermal treatment mainly by radiation
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B61—RAILWAYS
  • B61D—BODY DETAILS OR KINDS OF RAILWAY VEHICLES
  • B61D15/00—Other railway vehicles, e.g. scaffold cars; Adaptations of vehicles for use on railways
  • B61D15/06—Buffer cars; Arrangements or construction of railway vehicles for protecting them in case of collisions
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/023—Means for mechanically adjusting components not otherwise provided for
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
  • H01J37/06—Electron sources; Electron guns
  • H01J37/063—Geometrical arrangement of electrodes for beam-forming
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
  • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
  • Y02T30/00—Transportation of goods or passengers via railways, e.g. energy recovery or reducing air resistance

Landscapes

• Engineering & Computer Science (AREA)
• Analytical Chemistry (AREA)
• Chemical & Material Sciences (AREA)
• Toxicology (AREA)
• Health & Medical Sciences (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Mechanical Engineering (AREA)
• Transportation (AREA)
• Analysing Materials By The Use Of Radiation (AREA)
• Printing Methods (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=5764214

Family Applications (1)

Country Status (5)

Families Citing this family (1)

• 0
  • DE DENDAT20108D patent/DE20108C/de active Active
• 1970
  • 1970-02-27 DE DE19702010444 patent/DE2010444B2/de active Pending
• 1971
  • 1971-02-10 NL NL7101759A patent/NL7101759A/xx unknown
  • 1971-02-15 BE BE762925A patent/BE762925A/xx unknown
  • 1971-02-24 FR FR7106354A patent/FR2079037A5/fr not_active Expired
  • 1971-02-26 LU LU62672D patent/LU62672A1/xx unknown

Also Published As

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