LU52055A1 - - Google Patents

Info

Publication number
LU52055A1
LU52055A1 LU52055A LU52055A LU52055A1 LU 52055 A1 LU52055 A1 LU 52055A1 LU 52055 A LU52055 A LU 52055A LU 52055 A LU52055 A LU 52055A LU 52055 A1 LU52055 A1 LU 52055A1
Authority
LU
Luxembourg
Application number
LU52055A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of LU52055A1 publication Critical patent/LU52055A1/xx

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
LU52055A 1965-12-22 1966-09-28 LU52055A1 (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEJ29683A DE1261608B (de) 1965-12-22 1965-12-22 Hochfrequenz-Plasmagenerator

Publications (1)

Publication Number Publication Date
LU52055A1 true LU52055A1 (enrdf_load_html_response) 1966-11-28

Family

ID=7203674

Family Applications (1)

Application Number Title Priority Date Filing Date
LU52055A LU52055A1 (enrdf_load_html_response) 1965-12-22 1966-09-28

Country Status (5)

Country Link
BE (1) BE688340A (enrdf_load_html_response)
DE (1) DE1261608B (enrdf_load_html_response)
FR (1) FR1499554A (enrdf_load_html_response)
LU (1) LU52055A1 (enrdf_load_html_response)
NL (1) NL6615531A (enrdf_load_html_response)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1256686A (enrdf_load_html_response) * 1969-08-22 1971-12-15
BE758571A (fr) * 1969-11-06 1971-04-16 Euratom Generateur de plasma a haute frequence
CA1159012A (en) * 1980-05-02 1983-12-20 Seitaro Matsuo Plasma deposition apparatus
FR2715019B1 (fr) * 1994-01-13 1996-04-05 Plasmion Dispositif pour former un plasma par application de micro-ondes afin de produire un faisceau d'ions.

Also Published As

Publication number Publication date
BE688340A (enrdf_load_html_response) 1967-03-31
DE1261608B (de) 1968-02-22
FR1499554A (fr) 1967-10-27
NL6615531A (enrdf_load_html_response) 1967-06-23

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