LU52055A1LU52055ALU52055ALU52055A1LU 52055 A1LU52055 A1LU 52055A1LU 52055 ALU52055 ALU 52055ALU 52055 ALU52055 ALU 52055ALU 52055 A1LU52055 A1LU 52055A1
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LU
Luxembourg
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LU52055A
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H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
H05H1/00—Generating plasma; Handling plasma
H05H1/24—Generating plasma
H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy