LU48152A1 - - Google Patents

Info

Publication number
LU48152A1
LU48152A1 LU48152A LU48152A LU48152A1 LU 48152 A1 LU48152 A1 LU 48152A1 LU 48152 A LU48152 A LU 48152A LU 48152 A LU48152 A LU 48152A LU 48152 A1 LU48152 A1 LU 48152A1
Authority
LU
Luxembourg
Application number
LU48152A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to LU48152A priority Critical patent/LU48152A1/xx
Publication of LU48152A1 publication Critical patent/LU48152A1/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
LU48152A 1965-03-08 1965-03-08 LU48152A1 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
LU48152A LU48152A1 (en:Method) 1965-03-08 1965-03-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU48152A LU48152A1 (en:Method) 1965-03-08 1965-03-08

Publications (1)

Publication Number Publication Date
LU48152A1 true LU48152A1 (en:Method) 1966-09-08

Family

ID=19724211

Family Applications (1)

Application Number Title Priority Date Filing Date
LU48152A LU48152A1 (en:Method) 1965-03-08 1965-03-08

Country Status (1)

Country Link
LU (1) LU48152A1 (en:Method)

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