KR980006020A - Board Transfer Device - Google Patents

Board Transfer Device Download PDF

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Publication number
KR980006020A
KR980006020A KR1019970016528A KR19970016528A KR980006020A KR 980006020 A KR980006020 A KR 980006020A KR 1019970016528 A KR1019970016528 A KR 1019970016528A KR 19970016528 A KR19970016528 A KR 19970016528A KR 980006020 A KR980006020 A KR 980006020A
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KR
South Korea
Prior art keywords
roller
accessory
substrate
fixing part
roller fixing
Prior art date
Application number
KR1019970016528A
Other languages
Korean (ko)
Other versions
KR100245804B1 (en
Inventor
마사아키 히라타
가즈나리 타나베
메구무 후쿠이
Original Assignee
이시다 아키라
다이닛뽕스크린 세이조오 가부시키가이샤
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Publication of KR980006020A publication Critical patent/KR980006020A/en
Application granted granted Critical
Publication of KR100245804B1 publication Critical patent/KR100245804B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Liquid Crystal (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

본 발명은 간단하고도 또 저렴한 구조로서, 반송대상인 기판의 폭치수의 변경에 용이하게 대응할 수 있도록 하는 것을 과제로 한다. 상기의 과제를 해결하기 위해 본 장치는, 기판의 폭방향의 양쪽 단부에 바깥둘레면이 접촉하는 한 쌍의 롤러(30)를 롤러 축(20)과함께 회전구동하여 상기 기판의 반송을 한다. 키(24A)등의 부속장치에 롤러고정부인 V홈(25) 등을 마련해 둔다. 롤러 축(20)에 키 설치홈(23) 등의 부속장치를 마련하고, 이것에 상기 키(24A)등을 착탈이 가능하게 설치하도록 하고, 롤러(30)의 위치변경시에는, 상기 부속장치의 교환만으로 대응할 수 있도록 한다.This invention is a simple and inexpensive structure, and makes it a subject to be able to respond easily to the change of the width dimension of the board | substrate to be conveyed. In order to solve the said subject, this apparatus conveys the said board | substrate by rotating-driving a pair of rollers 30 which the outer periphery surface contact | connects the both ends of the width direction of a board | substrate with the roller shaft 20. The V-groove 25, which is a roller fixing part, is provided in an accessory device such as a key 24A. An accessory device such as a key installation groove 23 is provided in the roller shaft 20 so that the key 24A or the like can be detachably attached thereto, and the accessory device is changed when the roller 30 is repositioned. It is possible to respond only by exchanging.

Description

기판반송장치Board Transfer Device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명의 제1실시형태에 관련되는 기판반송장치의 주요부를 나타내는 분해 사시도.1 is an exploded perspective view showing a main part of a substrate transfer apparatus according to a first embodiment of the present invention.

제2도는 상기 기판 반송장치의 측면도.2 is a side view of the substrate transfer device.

제3도는 상기 기판반송장치의 정단면도.3 is a front sectional view of the substrate transport apparatus.

제4도는 상기 기판반송장치에 사용되는 각종 키의 정단면도.4 is a sectional front view of various keys used in the substrate transfer apparatus.

제5도는 상기 기판반송장치의 주요부를 나타내는 사시도.5 is a perspective view showing a main part of the substrate transfer apparatus.

Claims (9)

기판의 반송방향과 직교하는 방향인 기판의 폭방향으로 연장되고, 상기 반송방향과 나란하게 설치되는 복수개의 롤러 축과, 각 롤러 축에서 상기 기판의 폭방향의 양쪽단부에 접촉이 가능한 위치에 마련되는 롤러를 구비하고, 이 롤러의 바깥둘레면과 상기 기판의 폭방향의 양쪽단부가 접촉된 상태로 각 롤러 축 및 롤러가 동일한 방향으로 회전함으로써 기판을 반송하는 기판반송 장치에 있어서, 각 롤러측에 있어서 적어도 한쪽의 롤러에 대응하는 위치에 부속장치 설치부를 마련하는 한편, 이 부속장치 설치부에 착탈이 가능하게 설치되고, 상기 롤러가 착탈이 가능하게 고정되는 롤러고정부를 갖는 부속장치와, 상기 부속장치설치부에 설치되는 부속장치의 롤러 축에 대한 축방향의 상대적 변위를 규제하는 부속장치 규제수단을 구비한 것을 특징으로 하는 기판반송장치.A plurality of roller shafts which extend in the width direction of the substrate which is a direction orthogonal to the conveying direction of the substrate, are provided in parallel with the conveying direction, and are provided at positions where contact is possible at both ends of the width direction of the substrate in each roller shaft. A substrate carrying apparatus, comprising: a roller, wherein each roller shaft and roller are rotated in the same direction while the outer circumferential surface of the roller and both ends in the width direction of the substrate are in contact with each other, wherein each roller side An accessory having a roller fixing part provided at a position corresponding to at least one of the rollers while being detachable from the accessory mounting part, the roller fixing part being detachably fixed to the roller; And accessory attachment means for regulating the relative displacement in the axial direction with respect to the roller axis of the accessory provided in the accessory attachment portion. Substrate conveying apparatus to be used. 제1항에 있어서, 서로 다른 위치에 롤러고정부를 가지고, 또 상기 부속장치 설치부에 교환이 가능하게 설치되는 복수의 부속장치를 구비한 것을 특징으로 하는 기판반송장치.2. A substrate transport apparatus according to claim 1, further comprising a plurality of accessories which have roller fixing parts at different positions and are installed to be interchangeable with the accessory mounting portion. 제1항에 있어서, 상기 부속장치를, 그의 한쪽 단부가 기판의 폭방향의 외측을 향하느 제1상태와 내측을 향하는 제2상태의 양쪽으로 상기 부속장치설치부에 설치가 가능하게 되도록 구성함과 동시에, 상기 부속장치 설치부에 상기 제1상태로 부속장치가 설치된 경우의 롤러고정부의 위치와 상기 부속장치 설치부에 상기 제2상태로 부속장치가 설치된 경우의 롤러고정부의 위치가 롤러 축 방향과 다르게 되도록 상기 부속장치에서 롤러 고정부의 배치위치를 설정한 것을 특징으로 하는 기판반송장치.The apparatus according to claim 1, wherein the accessory is configured to be installed in the accessory installation portion in both of a first state in which one end thereof faces outward in the width direction of the substrate and a second state inward of the substrate. At the same time, the position of the roller fixing part when the accessory is installed in the first state and the position of the roller fixing part when the accessory is installed in the second state is attached to the accessory mounting part. And an arrangement position of the roller fixing part in the accessory device so as to be different from the axial direction. 제1항 내지 제3항중의 어느 한 항에 있어서, 각 롤러 축에서 양쪽 룰러에 대응하는 위치에 부속장치 설치부를 마련함과 동시에, 양쪽 부속장치 설치부에 설치되는 부속장치의 롤러고정부가 좌우대칭으로 위치하도록 양쪽 부속장치에 있어서 롤러고정부의 배치위치를 설정한 것을 특징으로 하는 기판반송장치.4. The roller fixing part of the attachment device according to any one of claims 1 to 3, wherein the attachment device is provided at a position corresponding to both rulers in each roller shaft, and the roller fixing part of the attachment device provided in both accessory installation parts is symmetrically. The substrate conveying apparatus characterized by the arrangement position of the roller fixing part set in both accessory apparatuses so that it may be located. 제4항에 있어서, 양쪽 부속장치 설치부에 동시에 설치되는 부속장치의 형상을 동일하게 한 것을 특징으로 하는 기판반송장치.5. A substrate transport apparatus according to claim 4, wherein the shapes of the accessories installed at the same time on both accessory mounting portions are the same. 제1항 내지 제5항중의 어느 한 항에 있어서, 상기 부속장치를, 상기 부속장치 설치부에 설치된 상태로 롤러 축의 둘레방향의 일부로부터 롤러 축의 직경방향의 외측으로 돌출하는 키로 하는 한편, 롤러의 안쪽둘레면에 상기 키와 끼워맞춤하는 키홈을 마련한 것을 특징으로 하는 기판반송장치.The roller according to any one of claims 1 to 5, wherein the accessory is a key that protrudes outwardly in the radial direction of the roller shaft from a part of the circumferential direction of the roller shaft in a state of being provided in the accessory attachment portion. And a key groove for fitting the key to an inner circumferential surface thereof. 제1항 내지 제6항중의 어느 한 항에 있어서, 상기 부속장치에 복수의 롤러고정부를 롤러 축의 축방향과 평행한 방향으로 위치를 어긋나게 마련한 것을 특징으로 하는 기판반송장치.7. The substrate transport apparatus according to any one of claims 1 to 6, wherein a plurality of roller fixing parts are provided in the accessory device in a position shifted in a direction parallel to the axial direction of the roller shaft. 제1항 내지 제7항중에 어느 한 항에 있어서, 상기 롤러고정부로서 상기 부속장치의 표면에 걸림오목부를 마련하는 한편, 각 롤러부재에 상기 걸림오목부에 대하여 이탈이 가능한 피걸림부와, 이 피걸림부를 상기 피걸림부가 상기 걸림오목부와 걸어 맞추는 방향으로 힘을 가하는 수단을 마련한 것을 특징으로 하는 기판반송장치.8. The hooking portion according to any one of claims 1 to 7, wherein the hook fixing portion is provided as a roller fixing portion on a surface of the accessory device, and the catching portion is detachable from the hooking recess portion on each roller member. And a means for applying a force in the direction in which the caught portion engages with the caught recess. 제8항에 있어서, 상기 피걸림부로서, 상기 롤러에 구슬몸체를 그의 일부가 롤러의 안쪽둘레면으로 부터 내측으로 돌출하는 상태로 전둥이 가능하고 또 직경 방향으로 이동이 가능하게 유지 시킨 것을 특징으로 하는 기판반송장치.The method according to claim 8, wherein as the caught portion, the roller body is held in such a state that its bead is movable and can be moved in the radial direction while a part thereof protrudes inward from the inner circumferential surface of the roller. Substrate conveying apparatus made of. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019970016528A 1996-06-27 1997-04-30 Substrate transporting apparatus KR100245804B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8167225A JPH1013091A (en) 1996-06-27 1996-06-27 Substrate transport apparatus
JP96-167225 1996-06-27

Publications (2)

Publication Number Publication Date
KR980006020A true KR980006020A (en) 1998-03-30
KR100245804B1 KR100245804B1 (en) 2000-03-02

Family

ID=15845774

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970016528A KR100245804B1 (en) 1996-06-27 1997-04-30 Substrate transporting apparatus

Country Status (2)

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JP (1) JPH1013091A (en)
KR (1) KR100245804B1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100864919B1 (en) * 2001-12-29 2008-10-22 엘지디스플레이 주식회사 Structure for supporting transfer pipe in tansfer apparatus
KR100846324B1 (en) 2007-07-03 2008-07-16 주식회사 에스에프에이 Printer
JP6437707B2 (en) * 2012-12-20 2018-12-12 株式会社Ｆｕｊｉ Substrate transfer device
DK3665105T3 (en) 2017-08-09 2023-03-20 Laitram Llc Roller with non-linear borehole in a conveyor system

Also Published As

Publication number Publication date
KR100245804B1 (en) 2000-03-02
JPH1013091A (en) 1998-01-16

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