KR980006013A - Wafer Fixture - Google Patents

Wafer Fixture Download PDF

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Publication number
KR980006013A
KR980006013A KR1019960023989A KR19960023989A KR980006013A KR 980006013 A KR980006013 A KR 980006013A KR 1019960023989 A KR1019960023989 A KR 1019960023989A KR 19960023989 A KR19960023989 A KR 19960023989A KR 980006013 A KR980006013 A KR 980006013A
Authority
KR
South Korea
Prior art keywords
wafer
filtering means
filter
vacuum filter
wafer holding
Prior art date
Application number
KR1019960023989A
Other languages
Korean (ko)
Inventor
손세현
박봉천
강윤구
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960023989A priority Critical patent/KR980006013A/en
Publication of KR980006013A publication Critical patent/KR980006013A/en

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

본 발명은 웨이퍼 고정 설비에 관해 개시한다. 본 발명에 의한 웨이퍼 고정장치는 일렬로 구성된 웨이퍼척과 진공 필터와 솔레노이드 밸브를 구비하는 웨이퍼 고정설비에 있어서, 상기 진공필터를 제1여과수단이라 할 때 상기 제1여과수단과 상기 솔레노이드 사이에 상기 진공필터로부터 비 여과된 물질을 포집하는 제2 여과수단을 구비한다. 따라서 본 발명을 이용하면, 솔레노이드 밸브의 기능저하를 막아서 공정진행중에 웨이퍼 척으로부터 웨이퍼의 이탈을 방지할 수 있으므로 공정의 계속적인 진행과 안정성을 확보할 수 있다.The present invention discloses a wafer holding facility. The wafer holding device according to the present invention is a wafer holding device including a wafer chuck, a vacuum filter, and a solenoid valve arranged in a row, wherein when the vacuum filter is called a first filtering means, the vacuum is formed between the first filtering means and the solenoid. And second filtration means for collecting unfiltered material from the filter. Therefore, by using the present invention, it is possible to prevent the deterioration of the solenoid valve and prevent the detachment of the wafer from the wafer chuck during the process, thereby ensuring the continuous progress and stability of the process.

Description

웨이퍼 고정설비Wafer Fixture

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 본 발명의 일실시예에 의한 웨이퍼 고정설비의 계통도이다.2 is a schematic diagram of a wafer holding facility according to an embodiment of the present invention.

Claims (2)

일렬로 구성된 웨이퍼척과 진공필터와 솔레노이드 벨브를 구비하는 웨이퍼 고정설비에 있어서, 상기 진공필터를 제1 여과수단이라 할 때 상기 제1 여과수단과 상기 솔레노이드 사이에 상기 진공필터로부터 비 여과된 포집하는 제2 여과수단을 구비하는 것을 특징으로 하는 웨이퍼 고정설비.A wafer holding apparatus comprising a wafer chuck arranged in a row, a vacuum filter, and a solenoid valve, wherein the vacuum filter is a first filtering means, wherein the first filter means collects unfiltered from the vacuum filter between the first filtering means and the solenoid. Wafer fixing equipment characterized by comprising two filtering means. 제1항에 있어서, 제2 여과수단은 버퍼 탱크(buffer tank)인 것을 특징으로 하는 웨이퍼 고정설비.The wafer holding equipment according to claim 1, wherein the second filtering means is a buffer tank. ※참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is to be disclosed based on the initial application.
KR1019960023989A 1996-06-26 1996-06-26 Wafer Fixture KR980006013A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960023989A KR980006013A (en) 1996-06-26 1996-06-26 Wafer Fixture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960023989A KR980006013A (en) 1996-06-26 1996-06-26 Wafer Fixture

Publications (1)

Publication Number Publication Date
KR980006013A true KR980006013A (en) 1998-03-30

Family

ID=66287871

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960023989A KR980006013A (en) 1996-06-26 1996-06-26 Wafer Fixture

Country Status (1)

Country Link
KR (1) KR980006013A (en)

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19960626

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid