KR980005450U - Wafer loading / unloading device - Google Patents

Wafer loading / unloading device

Info

Publication number
KR980005450U
KR980005450U KR2019960018726U KR19960018726U KR980005450U KR 980005450 U KR980005450 U KR 980005450U KR 2019960018726 U KR2019960018726 U KR 2019960018726U KR 19960018726 U KR19960018726 U KR 19960018726U KR 980005450 U KR980005450 U KR 980005450U
Authority
KR
South Korea
Prior art keywords
unloading device
wafer loading
wafer
loading
unloading
Prior art date
Application number
KR2019960018726U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960018726U priority Critical patent/KR980005450U/en
Publication of KR980005450U publication Critical patent/KR980005450U/en

Links

KR2019960018726U 1996-06-29 1996-06-29 Wafer loading / unloading device KR980005450U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960018726U KR980005450U (en) 1996-06-29 1996-06-29 Wafer loading / unloading device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960018726U KR980005450U (en) 1996-06-29 1996-06-29 Wafer loading / unloading device

Publications (1)

Publication Number Publication Date
KR980005450U true KR980005450U (en) 1998-03-30

Family

ID=60927400

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960018726U KR980005450U (en) 1996-06-29 1996-06-29 Wafer loading / unloading device

Country Status (1)

Country Link
KR (1) KR980005450U (en)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination