KR980005317U - Heater fixing structure of vertical furnace for semiconductor oxide film manufacturing - Google Patents

Heater fixing structure of vertical furnace for semiconductor oxide film manufacturing

Info

Publication number
KR980005317U
KR980005317U KR2019960019275U KR19960019275U KR980005317U KR 980005317 U KR980005317 U KR 980005317U KR 2019960019275 U KR2019960019275 U KR 2019960019275U KR 19960019275 U KR19960019275 U KR 19960019275U KR 980005317 U KR980005317 U KR 980005317U
Authority
KR
South Korea
Prior art keywords
oxide film
fixing structure
film manufacturing
semiconductor oxide
vertical furnace
Prior art date
Application number
KR2019960019275U
Other languages
Korean (ko)
Other versions
KR200216947Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960019275U priority Critical patent/KR200216947Y1/en
Publication of KR980005317U publication Critical patent/KR980005317U/en
Application granted granted Critical
Publication of KR200216947Y1 publication Critical patent/KR200216947Y1/en

Links

KR2019960019275U 1996-06-29 1996-06-29 Heater fixing structure of vertical furnace for semiconductor oxide film manufacturing KR200216947Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960019275U KR200216947Y1 (en) 1996-06-29 1996-06-29 Heater fixing structure of vertical furnace for semiconductor oxide film manufacturing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960019275U KR200216947Y1 (en) 1996-06-29 1996-06-29 Heater fixing structure of vertical furnace for semiconductor oxide film manufacturing

Publications (2)

Publication Number Publication Date
KR980005317U true KR980005317U (en) 1998-03-30
KR200216947Y1 KR200216947Y1 (en) 2001-05-02

Family

ID=60874174

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960019275U KR200216947Y1 (en) 1996-06-29 1996-06-29 Heater fixing structure of vertical furnace for semiconductor oxide film manufacturing

Country Status (1)

Country Link
KR (1) KR200216947Y1 (en)

Also Published As

Publication number Publication date
KR200216947Y1 (en) 2001-05-02

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