KR980004112U - 가스 인젝터 - Google Patents

가스 인젝터

Info

Publication number
KR980004112U
KR980004112U KR2019960018721U KR19960018721U KR980004112U KR 980004112 U KR980004112 U KR 980004112U KR 2019960018721 U KR2019960018721 U KR 2019960018721U KR 19960018721 U KR19960018721 U KR 19960018721U KR 980004112 U KR980004112 U KR 980004112U
Authority
KR
South Korea
Prior art keywords
gas injector
injector
gas
Prior art date
Application number
KR2019960018721U
Other languages
English (en)
Other versions
KR200158119Y1 (ko
Inventor
송정동
최기태
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019960018721U priority Critical patent/KR200158119Y1/ko
Publication of KR980004112U publication Critical patent/KR980004112U/ko
Application granted granted Critical
Publication of KR200158119Y1 publication Critical patent/KR200158119Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
KR2019960018721U 1996-06-29 1996-06-29 가스 인젝터 KR200158119Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960018721U KR200158119Y1 (ko) 1996-06-29 1996-06-29 가스 인젝터

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960018721U KR200158119Y1 (ko) 1996-06-29 1996-06-29 가스 인젝터

Publications (2)

Publication Number Publication Date
KR980004112U true KR980004112U (ko) 1998-03-30
KR200158119Y1 KR200158119Y1 (ko) 1999-10-15

Family

ID=19460168

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960018721U KR200158119Y1 (ko) 1996-06-29 1996-06-29 가스 인젝터

Country Status (1)

Country Link
KR (1) KR200158119Y1 (ko)

Also Published As

Publication number Publication date
KR200158119Y1 (ko) 1999-10-15

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Legal Events

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A201 Request for examination
E701 Decision to grant or registration of patent right
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FPAY Annual fee payment

Payment date: 20090624

Year of fee payment: 11

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