KR980002927A - Valve drive circuit of gas line - Google Patents

Valve drive circuit of gas line Download PDF

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Publication number
KR980002927A
KR980002927A KR1019960019975A KR19960019975A KR980002927A KR 980002927 A KR980002927 A KR 980002927A KR 1019960019975 A KR1019960019975 A KR 1019960019975A KR 19960019975 A KR19960019975 A KR 19960019975A KR 980002927 A KR980002927 A KR 980002927A
Authority
KR
South Korea
Prior art keywords
drive circuit
valve drive
gas line
ssr
long time
Prior art date
Application number
KR1019960019975A
Other languages
Korean (ko)
Other versions
KR0161822B1 (en
Inventor
김부업
정재용
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960019975A priority Critical patent/KR0161822B1/en
Publication of KR980002927A publication Critical patent/KR980002927A/en
Application granted granted Critical
Publication of KR0161822B1 publication Critical patent/KR0161822B1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/42—Actuating devices; Operating means; Releasing devices actuated by fluid by means of electrically-actuated members in the supply or discharge conduits of the fluid motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0644—One-way valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F17D1/02—Pipe-line systems for gases or vapours
    • F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/064—Circuit arrangements for actuating electromagnets

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Magnetically Actuated Valves (AREA)
  • Flow Control (AREA)

Abstract

본 발명에 의한 가스 라인의 밸브 드라이브 회로는 기계적으로 무접점하는 SSR(solid state relay) 소자들을 사용하고 있어 장시간 사용되어도 제어부의 신호에 따라 정확하게 솔레노이드 밸브를 온/오프시켜 에어 밸브를 정확하게 온/오프시킨다. 따라서, 밸브 드라이브 회로가 장시간 사용되어도 가스를 반응로에 정확하게 공급하여 공정의 신뢰성을 향상시킨다. 또한, 본 발명에 의한 가스 라인의 밸브 드라이브 회로는 SSR 소자들을 사용하므로 인쇄회로기판상에 실장되는 부품들의 수를 감소시킬 수 있어 회로의 단순화 및 보수 유지의 편리성을 이룩할 수 있다.The valve drive circuit of the gas line according to the present invention uses solid state relay (SSR) elements that are mechanically contactless, so that the solenoid valve can be accurately turned on / off according to the signal of the controller even when used for a long time. Let's do it. Therefore, even if the valve drive circuit is used for a long time, the gas is accurately supplied to the reactor to improve the reliability of the process. In addition, since the valve drive circuit of the gas line according to the present invention uses SSR elements, it is possible to reduce the number of components mounted on a printed circuit board, thereby achieving convenience of circuit simplification and maintenance.

Description

가스 라인의 밸브 드라이브 회로Valve drive circuit of gas line

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

Claims (1)

솔레노이드 밸브들에 연동하느 가스 라인의 에어 밸브를 온/오프시키는 밸브 드라이브 회로에 있어서, 상기 밸브 드라이브 회로가 제어부의 출력신호들의 상태에 따라 상기 솔레노이드 밸브들을 각각 온/오프시키는 복수개의 SSR(solid state relay)소자들과, 상기 제어부의 출력신호의 상태에 따라 상기 SSR 소자들에 공급될 전원을 온/오프시키는 SSR 소자를 포함하는 것을 특징으로 하는 가스 라인의 밸브 드라이브 회로.A valve drive circuit for turning on / off an air valve of a gas line interlocked with solenoid valves, the valve drive circuit comprising a plurality of SSRs (solid state) respectively turning on / off the solenoid valves according to the state of the output signals of the controller. relay) and an SSR element for turning on / off the power to be supplied to the SSR elements according to the state of the output signal of the controller. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019960019975A 1996-06-05 1996-06-05 Valve drive circuit of gas line KR0161822B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960019975A KR0161822B1 (en) 1996-06-05 1996-06-05 Valve drive circuit of gas line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960019975A KR0161822B1 (en) 1996-06-05 1996-06-05 Valve drive circuit of gas line

Publications (2)

Publication Number Publication Date
KR980002927A true KR980002927A (en) 1998-03-30
KR0161822B1 KR0161822B1 (en) 1999-02-18

Family

ID=19460845

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960019975A KR0161822B1 (en) 1996-06-05 1996-06-05 Valve drive circuit of gas line

Country Status (1)

Country Link
KR (1) KR0161822B1 (en)

Also Published As

Publication number Publication date
KR0161822B1 (en) 1999-02-18

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