KR980000911A - How to Rework Resistance - Google Patents

How to Rework Resistance Download PDF

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Publication number
KR980000911A
KR980000911A KR1019960020946A KR19960020946A KR980000911A KR 980000911 A KR980000911 A KR 980000911A KR 1019960020946 A KR1019960020946 A KR 1019960020946A KR 19960020946 A KR19960020946 A KR 19960020946A KR 980000911 A KR980000911 A KR 980000911A
Authority
KR
South Korea
Prior art keywords
resistance value
resistance
etching
heating portion
reworking
Prior art date
Application number
KR1019960020946A
Other languages
Korean (ko)
Inventor
김명호
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960020946A priority Critical patent/KR980000911A/en
Publication of KR980000911A publication Critical patent/KR980000911A/en

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Abstract

본 발명은 저항값을 재작업하는데 관한 것으로서, 더욱 상세하게는, 감열 기록 장치 내부에 형성되어 있는 저항부의 저항값을 재작업하는 방법에 관한 것이다. 발열부의 저항을 측정하여 기준 저항값과 비교하고 기준 저항값보다 상기 발열부의 저항값이 낮은 발열부가 있으면 저항값이 낮은 상기 발열부를 식각한다. 따라서, 본 발명에 따른 저항값을 재작업하는 방법은 식각을 통하여 발열부의 저항값을 스팩의 저항값에 접근하도록 발열부의 두께를 건식 식각하여 발열부의 저항값을 상승시킴으로써 거절없이 발열부를 사용함으로써 공정 수율을 효과가 있다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to reworking resistance values, and more particularly, to a method of reworking resistance values of a resistance portion formed inside a thermal recording apparatus. The resistance of the heat generating unit is measured and compared with a reference resistance value, and if the heat generating unit having a lower resistance value than the reference resistance value, the heat generating unit having a low resistance value is etched. Therefore, the method of reworking the resistance value according to the present invention is a process by using the heating portion without rejection by increasing the resistance value of the heating portion by dry etching the thickness of the heating portion so as to approach the resistance value of the heating portion through the etching through the etching process. Yield is effective.

Description

저항값을 재작업하는 방법How to Rework Resistance

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 일반적인 감열 기록 소자의 단면도이다.1 is a cross-sectional view of a general thermal recording element.

제2도는 감열 기록 소자의 저항부를 도시한 평면도이다.2 is a plan view showing the resistance portion of the thermal recording element.

Claims (4)

발열부의 저항을 측정하여 기준 저항값과 비교하는 단계, 상기기준 저항값보다 상기 발열부의 저항값이 낮은 발열부가 있으면 저항값이 낮은 상기 발열부를 식각하는 단계를 포함하는 저항값을 재작업하는 방법.Measuring a resistance of the heating unit and comparing the resistance to the reference resistance value; and if the heating unit has a lower resistance value of the heating unit than the reference resistance value, etching the heating unit having a lower resistance value. 제1항에서, 상기 식각은 CF4와 O2가스를 사용하는 저항값을 재작업하는 방법.The method of claim 1, wherein the etching reworks resistance values using CF 4 and O 2 gases. 제2항에서, 상기 식각은 CF4와 O2가스의 비율을 1 : 6으로 조성하는 저항값을 재작업하는 방법.3. The method of claim 2 , wherein the etching reworks the resistance value which sets the ratio of CF 4 and O 2 gas to 1: 6. 제1항에서, 상기 식각은 건식 식각 방법인 저항값을 재작업하는 방법.The method of claim 1, wherein the etching is a dry etching method. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019960020946A 1996-06-12 1996-06-12 How to Rework Resistance KR980000911A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960020946A KR980000911A (en) 1996-06-12 1996-06-12 How to Rework Resistance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960020946A KR980000911A (en) 1996-06-12 1996-06-12 How to Rework Resistance

Publications (1)

Publication Number Publication Date
KR980000911A true KR980000911A (en) 1998-03-30

Family

ID=66284428

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960020946A KR980000911A (en) 1996-06-12 1996-06-12 How to Rework Resistance

Country Status (1)

Country Link
KR (1) KR980000911A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5784876A (en) * 1980-11-18 1982-05-27 Ricoh Co Ltd Manufacture of thermal head
JPS61130061A (en) * 1984-11-29 1986-06-17 Pentel Kk Manufacture of thermal head
JPS6242858A (en) * 1985-08-20 1987-02-24 Oki Electric Ind Co Ltd Preparation of thermal head

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5784876A (en) * 1980-11-18 1982-05-27 Ricoh Co Ltd Manufacture of thermal head
JPS61130061A (en) * 1984-11-29 1986-06-17 Pentel Kk Manufacture of thermal head
JPS6242858A (en) * 1985-08-20 1987-02-24 Oki Electric Ind Co Ltd Preparation of thermal head

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