KR970701438A - NON-VAPORISING GETTER AND METHOD OF OBTAINING THE SAME - Google Patents

NON-VAPORISING GETTER AND METHOD OF OBTAINING THE SAME

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Publication number
KR970701438A
KR970701438A KR1019960704758A KR19960704758A KR970701438A KR 970701438 A KR970701438 A KR 970701438A KR 1019960704758 A KR1019960704758 A KR 1019960704758A KR 19960704758 A KR19960704758 A KR 19960704758A KR 970701438 A KR970701438 A KR 970701438A
Authority
KR
South Korea
Prior art keywords
getter
titanium
porosity
metal powder
vanadium
Prior art date
Application number
KR1019960704758A
Other languages
Korean (ko)
Other versions
KR100252330B1 (en
Inventor
니나 파브로브나 로이토바
세르게이 주리이비치 마네긴
이우리 미카일로비치 푸스토보이트
브라드미르 레오니도비치 스토리아로프
Original Assignee
주리 미크하일로 비치 푸스토보이트
토바리체스트브 에스 오그라니케노이 오트베트벤노스트쥬 "테크노박+"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from RU9494045576A external-priority patent/RU2073737C1/en
Application filed by 주리 미크하일로 비치 푸스토보이트, 토바리체스트브 에스 오그라니케노이 오트베트벤노스트쥬 "테크노박+" filed Critical 주리 미크하일로 비치 푸스토보이트
Publication of KR970701438A publication Critical patent/KR970701438A/en
Application granted granted Critical
Publication of KR100252330B1 publication Critical patent/KR100252330B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/183—Composition or manufacture of getters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/02235—Getter material for absorbing contamination

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Powder Metallurgy (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)

Abstract

본 발명은 비 증발성 게터 재료에 관한 것으로, 이것은 20 내지 35중량%의 바나듐(V), 0.1 내지 0.5중량%의 칼슘(Ca), 및 나머지는 티타늄(Ti)을 포함하고, 상기 게터는 전체 부피에 25 내지 65%의 다공성을 갖추고, 본 게터를 수득하기 위해서는 상술한 비율로 바나듐(V), 칼슘(Ca), 및 티타늄(Ti)을 포함하는 금속 분말이 약 0.7 내지 1.5g/㎤의 부피 밀도에서 변형구역으로 공급되고, 상기 변형 구역에서 분말은 압연에 의해 리본 형태의 게터 블랙크를 제조하고, 이 리본은 가열 구역으로 공급되는 균일한 부분으로 절단하고, 여기서, 1Pa 이하의 압력이 생성되어 유지되며 그리고 상기 블랭크 부분은 티타늄 바나듐 합금의 0.6 이하의 온도로 가열되고, 그리고 이에따라 이것을 계속 유지하여, 전체 부피에 대해 25 내지 65%의 다공성을 갖는 게터를 수득한다.The present invention relates to a non-evaporable getter material, which comprises 20 to 35 weight percent vanadium (V), 0.1 to 0.5 weight percent calcium (Ca), and the balance titanium (Ti), wherein the getter is total In order to obtain the present getter having a porosity of 25 to 65% and to obtain the present getter, the metal powder containing vanadium (V), calcium (Ca), and titanium (Ti) may contain about 0.7 to 1.5 g / cm 3. The bulk density is fed to the deformation zone, in which the powder is produced by rolling to produce a getter black in the form of a ribbon, which ribbon is cut into uniform portions fed to the heating zone, where a pressure of 1 Pa or less The resulting portion is maintained and the blank portion is heated to a temperature below 0.6 of the titanium vanadium alloy, and accordingly maintained, to obtain a getter having a porosity of 25 to 65% with respect to the total volume.

Description

비증발성 게터 및 그 제조방법(NON-VAPORISING GETTER AND METHOD OF OBTAINING THE SAME)NON-VAPORISING GETTER AND METHOD OF OBTAINING THE SAME

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

Claims (5)

20 내지 35중량%의 바나듐, 0.1 내지 0.5중량%의 칼슘, 나머지는 티타늄을 포함하는 비증발성 게터에 있어서, 상기 게터가 25 내지 65부피%의 다공성을 갖는 것을 특징으로 하는 비증발성 게터.A non-evaporable getter comprising 20 to 35 weight percent vanadium, 0.1 to 0.5 weight percent calcium, the remainder being titanium, wherein the getter has a porosity of 25 to 65 volume percent. (1)20 내지 35중량%의 바나듐, 0.1 내지 0.5중량%의 칼슘, 나머지는 티타늄을 포함하는 금속 분말을 변형구역으로 공급하는 단계로서, 상기 금속 분말은 압연에 의해 형성되고, 이 결과로서, 게터 블랭크는 리본 형태로 제조되고, 상기 리본이 상기 변형구역을 벗어난 후에 표준 부분을 절단되고, 상기 부분이 가열 구역으로 더 운반되고, 상기 가역 구역내에서 1Pa 이하의 압력을 생성하고 유지하는 단계와, 그리고 (2) 상기 게터 블랭크를 티타늄 바나듐 합금의 용융점 보다 0.6배 더 낮은 온도로 가열시키고, 이에따라 유지한 후, 이 결과로 25 내지 65부피%의 다공성을 갖는 게터가 제조되는 단계를 포함하고 있는 비증발성 게터를 제조하는 방법에 있어서, 상기 변형 구역으로 공급되는 상기 금속 분말이 약 0.7 내지 약 1.5g/㎤의 범위의 부피 밀도를 갖는 것을 특징으로 하는 비증발성 게터를 제조하는 방법.(1) supplying a metal powder comprising 20 to 35% by weight of vanadium, 0.1 to 0.5% by weight of calcium, and the remainder to titanium, wherein the metal powder is formed by rolling, and as a result, The getter blank is made in the form of a ribbon, the standard portion is cut after the ribbon leaves the deformation zone, the portion is further transported to the heating zone, and generates and maintains a pressure of 1 Pa or less within the reversible zone; And (2) heating the getter blank to a temperature 0.6 times lower than the melting point of the titanium vanadium alloy and thus maintaining, thereby producing a getter having a porosity of 25 to 65% by volume. A method of making a non-evaporable getter, wherein the metal powder fed to the deformation zone has a bulk density in the range of about 0.7 to about 1.5 g / cm 3. Method for producing a non-evaporable getter according to vocalization. 제2항에 있어서, 상기 변형 구역으로 공급되는 금속 분말이 50㎛ 이하의 입자크기를 갖는 70중량% 이하의 분획을 포함하는 것을 특징으로 하는 방법.The method of claim 2 wherein the metal powder fed to the deformation zone comprises up to 70% by weight fraction having a particle size of 50 μm or less. 제2항 또는 제3항에 있어서, 상기 게터 블랭크가 섭씨 약 750도 내지 섭씨 약 950도 범위의 온도로 가열되는 것을 특징으로 하는 방법.4. The method of claim 2 or 3, wherein the getter blank is heated to a temperature in the range of about 750 degrees Celsius to about 950 degrees Celsius. 제2항 내지 제4항중 어느 한 항에 있어서, 상기 게터 블랭크의 다공성이 45% 이하일때, 상기 표준 부분이 감겨지는 것을 특징으로 하는 방법.The method of claim 2, wherein the standard portion is wound when the getter blank has a porosity of 45% or less. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019960704758A 1994-12-29 1995-12-21 Non-vaporising getter and method of obtaining the same KR100252330B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
RU9494045576A RU2073737C1 (en) 1994-12-29 1994-12-29 Nondusting tape gas absorber and method of manufacture thereof
RU94045576 1994-12-29
PCT/RU1995/000276 WO1996021958A2 (en) 1994-12-29 1995-12-21 Non-vaporising getter and method of obtaining the same

Publications (2)

Publication Number Publication Date
KR970701438A true KR970701438A (en) 1997-03-17
KR100252330B1 KR100252330B1 (en) 2000-05-01

Family

ID=20163609

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960704758A KR100252330B1 (en) 1994-12-29 1995-12-21 Non-vaporising getter and method of obtaining the same

Country Status (3)

Country Link
KR (1) KR100252330B1 (en)
AT (1) ATE182029T1 (en)
DE (1) DE69510674T2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101719911B1 (en) * 2015-07-22 2017-03-24 한국항공우주연구원 A low pressure chamber for providing and keeping a predetermined pressure

Also Published As

Publication number Publication date
ATE182029T1 (en) 1999-07-15
DE69510674D1 (en) 1999-08-12
DE69510674T2 (en) 1999-12-02
KR100252330B1 (en) 2000-05-01

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