KR970077126A - Modified illumination method by improved fly-eye lens - Google Patents
Modified illumination method by improved fly-eye lens Download PDFInfo
- Publication number
- KR970077126A KR970077126A KR1019960016251A KR19960016251A KR970077126A KR 970077126 A KR970077126 A KR 970077126A KR 1019960016251 A KR1019960016251 A KR 1019960016251A KR 19960016251 A KR19960016251 A KR 19960016251A KR 970077126 A KR970077126 A KR 970077126A
- Authority
- KR
- South Korea
- Prior art keywords
- fly
- modified illumination
- illumination method
- eye lens
- modified
- Prior art date
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- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Projection Apparatus (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Abstract
A modified illumination method by improved fliescentries is disclosed.
In a modified illumination method in which a bore for a modified illumination consisting of a plurality of holes is provided at the front end of a fly-eye lens, independent fly-eye lenses are arranged so as to correspond to holes of a bore for modified illumination to form a lens group. The end of the fly-eye lens can be precisely aligned with the end of the bore for deformed illumination, and the beam uniformity can be improved.
Description
Since this is a trivial issue, I did not include the contents of the text.
FIG. 5 is a schematic view showing the incidence incidence illumination method according to the present invention; FIG.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960016251A KR100213200B1 (en) | 1996-05-15 | 1996-05-15 | Modified illumination method using improved fly eye lens |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960016251A KR100213200B1 (en) | 1996-05-15 | 1996-05-15 | Modified illumination method using improved fly eye lens |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970077126A true KR970077126A (en) | 1997-12-12 |
KR100213200B1 KR100213200B1 (en) | 1999-08-02 |
Family
ID=19458793
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960016251A KR100213200B1 (en) | 1996-05-15 | 1996-05-15 | Modified illumination method using improved fly eye lens |
Country Status (1)
Country | Link |
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KR (1) | KR100213200B1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100388490B1 (en) * | 1999-06-17 | 2003-06-25 | 한국전자통신연구원 | Off axis illumination aperture having fly eye lens and method for forming the same |
-
1996
- 1996-05-15 KR KR1019960016251A patent/KR100213200B1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100388490B1 (en) * | 1999-06-17 | 2003-06-25 | 한국전자통신연구원 | Off axis illumination aperture having fly eye lens and method for forming the same |
Also Published As
Publication number | Publication date |
---|---|
KR100213200B1 (en) | 1999-08-02 |
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E701 | Decision to grant or registration of patent right | ||
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Payment date: 20070418 Year of fee payment: 9 |
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