KR970077126A - Modified illumination method by improved fly-eye lens - Google Patents

Modified illumination method by improved fly-eye lens Download PDF

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Publication number
KR970077126A
KR970077126A KR1019960016251A KR19960016251A KR970077126A KR 970077126 A KR970077126 A KR 970077126A KR 1019960016251 A KR1019960016251 A KR 1019960016251A KR 19960016251 A KR19960016251 A KR 19960016251A KR 970077126 A KR970077126 A KR 970077126A
Authority
KR
South Korea
Prior art keywords
fly
modified illumination
illumination method
eye lens
modified
Prior art date
Application number
KR1019960016251A
Other languages
Korean (ko)
Other versions
KR100213200B1 (en
Inventor
손창진
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960016251A priority Critical patent/KR100213200B1/en
Publication of KR970077126A publication Critical patent/KR970077126A/en
Application granted granted Critical
Publication of KR100213200B1 publication Critical patent/KR100213200B1/en

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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection Apparatus (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)

Abstract

A modified illumination method by improved fliescentries is disclosed.

In a modified illumination method in which a bore for a modified illumination consisting of a plurality of holes is provided at the front end of a fly-eye lens, independent fly-eye lenses are arranged so as to correspond to holes of a bore for modified illumination to form a lens group. The end of the fly-eye lens can be precisely aligned with the end of the bore for deformed illumination, and the beam uniformity can be improved.

Description

Modified illumination method by improved fly-eye lens

Since this is a trivial issue, I did not include the contents of the text.

FIG. 5 is a schematic view showing the incidence incidence illumination method according to the present invention; FIG.

Claims (3)

A deformed illumination method comprising the steps of: forming a plurality of holes in a front end of a fly-eye lens, the modified fly's eye lens being arranged so as to correspond to holes of the aperture for the modified illumination, thereby forming a lens group. 2. The modified illumination method according to claim 1, wherein the lens group corresponding to the hole of the bore for deformed illumination is formed so as to have a predetermined gap with another adjacent lens group. The deformed illumination method according to claim 1, wherein the number and arrangement of the fly-eye lenses are adjusted according to the type of aperture for the modified illumination. ※ Note: It is disclosed by the contents of the first application.
KR1019960016251A 1996-05-15 1996-05-15 Modified illumination method using improved fly eye lens KR100213200B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960016251A KR100213200B1 (en) 1996-05-15 1996-05-15 Modified illumination method using improved fly eye lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960016251A KR100213200B1 (en) 1996-05-15 1996-05-15 Modified illumination method using improved fly eye lens

Publications (2)

Publication Number Publication Date
KR970077126A true KR970077126A (en) 1997-12-12
KR100213200B1 KR100213200B1 (en) 1999-08-02

Family

ID=19458793

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960016251A KR100213200B1 (en) 1996-05-15 1996-05-15 Modified illumination method using improved fly eye lens

Country Status (1)

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KR (1) KR100213200B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100388490B1 (en) * 1999-06-17 2003-06-25 한국전자통신연구원 Off axis illumination aperture having fly eye lens and method for forming the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100388490B1 (en) * 1999-06-17 2003-06-25 한국전자통신연구원 Off axis illumination aperture having fly eye lens and method for forming the same

Also Published As

Publication number Publication date
KR100213200B1 (en) 1999-08-02

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