KR970075946A - Position control device for XY-stage - Google Patents

Position control device for XY-stage Download PDF

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Publication number
KR970075946A
KR970075946A KR1019960016952A KR19960016952A KR970075946A KR 970075946 A KR970075946 A KR 970075946A KR 1019960016952 A KR1019960016952 A KR 1019960016952A KR 19960016952 A KR19960016952 A KR 19960016952A KR 970075946 A KR970075946 A KR 970075946A
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KR
South Korea
Prior art keywords
stage
position error
sinusoidal wave
acceleration
converting
Prior art date
Application number
KR1019960016952A
Other languages
Korean (ko)
Other versions
KR0176444B1 (en
Inventor
조정호
Original Assignee
이대원
삼성항공산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 이대원, 삼성항공산업 주식회사 filed Critical 이대원
Priority to KR1019960016952A priority Critical patent/KR0176444B1/en
Publication of KR970075946A publication Critical patent/KR970075946A/en
Application granted granted Critical
Publication of KR0176444B1 publication Critical patent/KR0176444B1/en

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

XY-스테이지용 위치 제어 장치가 개시된다.A position control device for an XY-stage is disclosed.

본 발명은 XY-스테이지 시스템을 전체적으로 제어하는 CPU와, 상기 CPU로부터 전송받은 XY-스테니지의 현재위치와 목표위치와의 위치 오차 데이타를 소정 신호로 변환하여 출력하는 위치 오차 변환부와, 상기 위치 오차 변환부로부터 출력된 신호를 입력받아 비례, 적분 및 미분제어를 수행하는 PID 제어부와, 상기 XY-스테이지의 가감속 구간에서 발생되는 실제적인 위치 오차를 보상해주기 위한 위치 오차 보상부와, 상기 XY-스테이지의 목표 위치량을 정현파 값으로 변환하여 출력하는 정현파 변환부와, 상기 정현파 변환부로부터의 신호를 입력받아 상기 XY-스테이지의 모터를 구동시키는 모터 드라이버를 구비한다.A position error converting unit for converting position error data between a current position and a target position of the XY-stage transmitted from the CPU into a predetermined signal and outputting the predetermined signal; A position error compensator for compensating an actual position error generated in the acceleration / deceleration section of the XY-stage, a position error compensator for compensating an actual position error generated in the acceleration / deceleration section of the XY-stage, A sinusoidal wave conversion unit for converting the target position amount of the stage into a sinusoidal wave value and outputting the sinusoidal wave value; and a motor driver for receiving the signal from the sinusoidal wave conversion unit and driving the motor of the XY-stage.

이와 같은 본 발명에 의하면, 위치 오차 보상부에 의해 구동 모터의 가감속 구간에서 발생하는 실제적인 위치 오차를 신속히 보상하여 제어에 반영하므로 고정밀도의 위치 제어가 가능해 진다.According to the present invention, the position error compensator compensates for the actual position error occurring in the acceleration / deceleration section of the driving motor quickly and is reflected in the control, so that it is possible to perform the position control with high accuracy.

Description

XY-스테이지용 위치 제어 장치Position control device for XY-stage

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제4도는 본 발명에 따른 XY-스테이지용 위치 제어 장치의 개략적인 시스템 구성도, 제5도는 제4도의 위치 제어 장치에서 PID 제어부의 내부 회로 구성도.FIG. 4 is a schematic system configuration diagram of an XY-stage position control apparatus according to the present invention, and FIG. 5 is an internal circuit diagram of a PID control section in the position control apparatus of FIG.

Claims (2)

XY-스테이지 시스템을 전체적으로 제어하는 CPU와, 상기 CPU로부터 전송받은 XY-스테이지의 현재 위치와 목표위치와의 위치 오차 데이타를 소정 신호로 변환하여 출력하는 위치 오차 변환부와, 상기 위치 오차 변환부로부터 출력된 신호를 입력받아 비례, 적분 및 미분제어를 수행하는 PID 제어부와, 상기 XY-스테이지의 가감속 구간에서 발생되는 실제적인 위치 오차를 보상해주기 위한 위치 오차 보상부와, 상기 XY-스테이지의 목표 위치량을 정현파 값으로 변화하여 출력하는 정현파 변환부와, 상기 정현파 변환부로부터의 신호를 입력받아 상기 XY-스테이지의 모터를 구동시키는 모터 드라이버를 구비하여 된 것을 특징으로 하는 XY-스테이지용 위치 제어 장치.A position error converting unit for converting position error data between a current position and a target position of the XY-stage transmitted from the CPU into a predetermined signal and outputting the predetermined signal; A position error compensator for compensating an actual position error generated in the acceleration / deceleration section of the XY-stage, and a position error compensator for compensating an actual position error of the XY- And a motor driver for driving the motor of the XY-stage in response to the signal from the sinusoidal wave converting unit. Device. 제1항에 있어서, 상기 CPU와 XY-스테이지 사이에, 전자파의 간섭 현상을 관측하여 CPU로 전송하는 인터페로미터가 더 구비되어 있는 것을 특징으로 하는 XY-스테이지용 위치 제어 장치.The position control device for an XY-stage according to claim 1, further comprising an interferometer between the CPU and the XY-stage for observing interference phenomenon of electromagnetic waves and transmitting the interference phenomenon to the CPU. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960016952A 1996-05-20 1996-05-20 Position control device for XY-stage KR0176444B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960016952A KR0176444B1 (en) 1996-05-20 1996-05-20 Position control device for XY-stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960016952A KR0176444B1 (en) 1996-05-20 1996-05-20 Position control device for XY-stage

Publications (2)

Publication Number Publication Date
KR970075946A true KR970075946A (en) 1997-12-10
KR0176444B1 KR0176444B1 (en) 1999-04-01

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100331453B1 (en) * 2000-07-18 2002-04-09 윤종용 Position sensing apparatus for an electrostatic XY-stage using time-division multiplexing

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102280285B1 (en) * 2019-06-25 2021-07-21 이노6 주식회사 Linear conveyor system control unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100331453B1 (en) * 2000-07-18 2002-04-09 윤종용 Position sensing apparatus for an electrostatic XY-stage using time-division multiplexing

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