KR970067832A - A wafer on which an electrostatic protection metal pattern is formed - Google Patents

A wafer on which an electrostatic protection metal pattern is formed Download PDF

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Publication number
KR970067832A
KR970067832A KR1019960006497A KR19960006497A KR970067832A KR 970067832 A KR970067832 A KR 970067832A KR 1019960006497 A KR1019960006497 A KR 1019960006497A KR 19960006497 A KR19960006497 A KR 19960006497A KR 970067832 A KR970067832 A KR 970067832A
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KR
South Korea
Prior art keywords
metal pattern
electrostatic protection
protection metal
chips
wafer
Prior art date
Application number
KR1019960006497A
Other languages
Korean (ko)
Inventor
심상남
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960006497A priority Critical patent/KR970067832A/en
Publication of KR970067832A publication Critical patent/KR970067832A/en

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Abstract

본 발명은 정전기 보호 금속 패턴이 형성되어 있는 웨이퍼에 관한 것이다. 상기 다수의 칩을 서로 전기적으로 연결시키는 기능을 갖는 정전기 보호 금속 패턴이 상기 다수의 칩 교차 부분에 형성되어 있으며,상기 정전기 보호 금속 패턴은 섬모양으로 상기 다수의 칩과 부분적으로 연결되게 형성되어 있다. 따라서, 방전시 어느 한 칩으로 정전기가 흐르지 않고 다수의 칩으로 분산되므로 접합이 파괴되는 현상을 방지할 수 있으며, 다수의 칩을 각각 분리시킬 때는 정전기 보호 금속 패턴 상부에 절단선을 따라 절단할 때 절단이 용이하며 절단 부위도 깨끗하게 된다.The present invention relates to a wafer on which an electrostatic protection metal pattern is formed. An electrostatic protection metal pattern having a function of electrically connecting the plurality of chips to each other is formed on the plurality of chip intersections, and the electrostatic protection metal pattern is partially connected to the plurality of chips in an island shape . Therefore, it is possible to prevent breakage of the junction due to dispersion of the chip into a plurality of chips without causing static electricity to flow to the one chip at the time of discharge, and when cutting off a plurality of chips, when cutting along the cut line on the electrostatic protection metal pattern It is easy to cut and the cutting area is clean.

Description

정전기 보호 금속 패턴이 형성되어 있는 웨이퍼A wafer on which an electrostatic protection metal pattern is formed

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제2도는 본 발명의 실시 예에 따른 정전기 보호 금속 패턴이 형성되어 있는 웨이퍼를 나타낸 도면이다.FIG. 2 is a view showing a wafer on which an electrostatic protection metal pattern according to an embodiment of the present invention is formed.

Claims (2)

기판, 상기 기판 위에 행렬로 형성되어 있는 다수의 칩, 상기 다수의 칩을 서로 전기적으로 연결시키는 정전기 보호 금속 패턴을 포함하는 정전기 보호 금속 패턴이 형성되어 있는 웨이퍼.An electrostatic protection metal pattern comprising a substrate, a plurality of chips formed in a matrix on the substrate, and an electrostatic protection metal pattern electrically connecting the plurality of chips to each other. 제1항에서, 상기 정전기 보호 금속 패턴은 섬모양으로 상기 다수의 칩과 부분적으로 연결되게 형성되어 있는 정전기 보호 금속 패턴이 형성되어 있는 웨이퍼.2. The wafer according to claim 1, wherein the electrostatic protection metal pattern is an island-shaped electrostatic protection metal pattern formed in part to be connected to the plurality of chips.
KR1019960006497A 1996-03-12 1996-03-12 A wafer on which an electrostatic protection metal pattern is formed KR970067832A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960006497A KR970067832A (en) 1996-03-12 1996-03-12 A wafer on which an electrostatic protection metal pattern is formed

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960006497A KR970067832A (en) 1996-03-12 1996-03-12 A wafer on which an electrostatic protection metal pattern is formed

Publications (1)

Publication Number Publication Date
KR970067832A true KR970067832A (en) 1997-10-13

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ID=66215964

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KR1019960006497A KR970067832A (en) 1996-03-12 1996-03-12 A wafer on which an electrostatic protection metal pattern is formed

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KR (1) KR970067832A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040108556A (en) * 2003-06-05 2004-12-24 미쓰보시 다이야몬도 고교 가부시키가이샤 Device and method for scribing substrate of brittle material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040108556A (en) * 2003-06-05 2004-12-24 미쓰보시 다이야몬도 고교 가부시키가이샤 Device and method for scribing substrate of brittle material

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