KR970066485A - Adjusting device support spacing of heat treatment device - Google Patents

Adjusting device support spacing of heat treatment device Download PDF

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Publication number
KR970066485A
KR970066485A KR1019970002731A KR19970002731A KR970066485A KR 970066485 A KR970066485 A KR 970066485A KR 1019970002731 A KR1019970002731 A KR 1019970002731A KR 19970002731 A KR19970002731 A KR 19970002731A KR 970066485 A KR970066485 A KR 970066485A
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KR
South Korea
Prior art keywords
heat treatment
rotational force
treatment chamber
transmission mechanism
rotary
Prior art date
Application number
KR1019970002731A
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Korean (ko)
Other versions
KR100215255B1 (en
Inventor
히데키 다나카
Original Assignee
시마자키 기요시
다바이 에스펙 가부시키가이샤
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Application filed by 시마자키 기요시, 다바이 에스펙 가부시키가이샤 filed Critical 시마자키 기요시
Publication of KR970066485A publication Critical patent/KR970066485A/en
Application granted granted Critical
Publication of KR100215255B1 publication Critical patent/KR100215255B1/en

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Abstract

절차바꿈없이 물품지지간격을 변경할 수 있게 한다.Allows you to change the product support spacing without changing the procedure.

서보모터(90)의 회전을 기어(111, 112), 회전 전달관(113), 볼 스플라인부(114)를 통하여 회전축(100)에 전하고, 열처리실(3)내에서도, 이 회전을 링크기구, 기어기구 등을 통하여, 물품을 얹는 기판받이부를 다수 지지하여 서로 대향하여 배치된 지지축에 전달하고, 지지축의 대향가격을 변경할 수 있게 한다.The rotation of the servo motor 90 is transmitted to the rotating shaft 100 through the gears 111 and 112, the rotation transmission pipe 113, and the ball spline 114, and the rotation of the servo motor 90 is transmitted to the link mechanism, Through a gear mechanism or the like, a plurality of substrate receiving parts on which the article is placed are supported to be transferred to the support shafts arranged to face each other, and the opposite price of the support shafts can be changed.

열처리실 밖에서 서보모터의 구동에 의해 기판받이부 간격을 바꿀 수 있다. 절차바꿈이 필요없고, 모터 등의 열에 의한 악영향도 피할 수 있다.The spacing of the substrate receiving portion can be changed by driving the servomotor outside the heat treatment chamber. No procedure change is necessary, and adverse effects from heat such as a motor can be avoided.

Description

열처리장치의 물품지지간격 조정장치Adjusting device support spacing of heat treatment device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제5도는 상기 열처리장치의 승강장치부분을 나타내는 정면도, 제6도는 상기 승강장치부분의 평면도, 제7도는 상기 열처리장치에 있어서 본 발명이 적용된 물품지지간격 조정장치의 구성예를 나타내는 단면도.FIG. 5 is a front view showing a lift device portion of the heat treatment apparatus, FIG. 6 is a plan view of the lift device portion, and FIG. 7 is a sectional view showing a configuration example of the article support spacing adjusting device to which the present invention is applied in the heat treatment device.

Claims (1)

회전구동부와, 회전축과, 외부회전 전달기구와, 내부회전 전달기구와, 외통을 구비하고, 상기 회전구동부는 열처리장치의 열처리실 밖에 설치되어 회전력을 발생하는 출력단을 구비하며, 상기 회전축은 상기 열처리실 외부에서 상기 열처리실 내부까지 연설되어 있어 적재부로서 승강가능하게 상기 열처리실내에 설치되고 평판산 물품을 지지할 수 있도록 서로 대향하여 설치된 복수의 지지부재를 지지하는 지지축을 구비한 적재부에 회전자재로 지지되고 상기 외부측에 회전력 입력부와 상기 내부측에 회전력 출력부를 구비하고, 상기 외부회전 전달기구는 상기 출력단과 상기 입력부 사이에 개재하여 상기 회전구동부의 회전력을 상기 회전축에 전달하고, 상기 내부회전력 전달기구는 상기 출력부와 상기 출력축 사이에 개재하여 상기 출력부에서 전달된 회전력을 상기 지지축에 전달하고, 상기 외통은 상기 회전축을 둘러싸도록 상기 적재부에 부착되고 그 적재부가 상기 열처리실 내에서도 가장 상승한 위치에 있을 때에 일단측이 상기 외부로 돌출하도록 연설되어 있는 것을 특징으로 하는 열처리장치이 물품지지간격 조정장치.And a rotary drive unit, a rotary shaft, an external rotary transmission mechanism, an internal rotary transmission mechanism, and an outer cylinder, wherein the rotary drive unit is provided outside the heat treatment chamber of the heat treatment apparatus and has an output end for generating a rotational force. Rotated in the loading section having support shafts extending from the outside to the inside of the heat treatment chamber and installed in the heat treatment chamber so as to be able to move up and down to support the flat plate article. It is supported by the material and has a rotational force input unit on the outer side and a rotational force output unit on the inner side, the external rotation transmission mechanism transmits the rotational force of the rotational drive unit to the rotary shaft via the output end and the input unit, the inner The torque transmission mechanism is interposed between the output unit and the output shaft at the output unit. Delivers the rotational force delivered to the support shaft, and the outer cylinder is attached to the loading portion so as to surround the rotating shaft, and is protruded so that one end thereof protrudes to the outside when the loading portion is in the most elevated position even in the heat treatment chamber. The heat treatment device is a product support interval adjusting device. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019970002731A 1996-03-18 1997-01-30 Adjusting device of object supporting span for thermal treatment unit KR100215255B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP09053796A JP3622932B2 (en) 1996-03-18 1996-03-18 Article support interval adjusting device for heat treatment apparatus
JP96-90537 1996-03-18

Publications (2)

Publication Number Publication Date
KR970066485A true KR970066485A (en) 1997-10-13
KR100215255B1 KR100215255B1 (en) 1999-08-16

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970002731A KR100215255B1 (en) 1996-03-18 1997-01-30 Adjusting device of object supporting span for thermal treatment unit

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JP (1) JP3622932B2 (en)
KR (1) KR100215255B1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3929364B2 (en) * 2002-06-26 2007-06-13 エスペック株式会社 Substrate support and loading / unloading device
JP5613943B2 (en) * 2010-03-29 2014-10-29 株式会社ファインシンター Continuous sintering furnace
CN102435307B (en) * 2011-11-09 2013-09-18 深圳市华星光电技术有限公司 Detection method of UV (Ultraviolet) illumination of multi-layer UV hot oven in TFT-LCD (Thin Film Transistor-Liquid Crystal Display) manufacturing process and combined disk extraction device for implementing detection method

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Publication number Publication date
JPH09250885A (en) 1997-09-22
KR100215255B1 (en) 1999-08-16
JP3622932B2 (en) 2005-02-23

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