KR970066485A - Adjusting device support spacing of heat treatment device - Google Patents
Adjusting device support spacing of heat treatment device Download PDFInfo
- Publication number
- KR970066485A KR970066485A KR1019970002731A KR19970002731A KR970066485A KR 970066485 A KR970066485 A KR 970066485A KR 1019970002731 A KR1019970002731 A KR 1019970002731A KR 19970002731 A KR19970002731 A KR 19970002731A KR 970066485 A KR970066485 A KR 970066485A
- Authority
- KR
- South Korea
- Prior art keywords
- heat treatment
- rotational force
- treatment chamber
- transmission mechanism
- rotary
- Prior art date
Links
Landscapes
- Furnace Charging Or Discharging (AREA)
- Tunnel Furnaces (AREA)
Abstract
절차바꿈없이 물품지지간격을 변경할 수 있게 한다.Allows you to change the product support spacing without changing the procedure.
서보모터(90)의 회전을 기어(111, 112), 회전 전달관(113), 볼 스플라인부(114)를 통하여 회전축(100)에 전하고, 열처리실(3)내에서도, 이 회전을 링크기구, 기어기구 등을 통하여, 물품을 얹는 기판받이부를 다수 지지하여 서로 대향하여 배치된 지지축에 전달하고, 지지축의 대향가격을 변경할 수 있게 한다.The rotation of the servo motor 90 is transmitted to the rotating shaft 100 through the gears 111 and 112, the rotation transmission pipe 113, and the ball spline 114, and the rotation of the servo motor 90 is transmitted to the link mechanism, Through a gear mechanism or the like, a plurality of substrate receiving parts on which the article is placed are supported to be transferred to the support shafts arranged to face each other, and the opposite price of the support shafts can be changed.
열처리실 밖에서 서보모터의 구동에 의해 기판받이부 간격을 바꿀 수 있다. 절차바꿈이 필요없고, 모터 등의 열에 의한 악영향도 피할 수 있다.The spacing of the substrate receiving portion can be changed by driving the servomotor outside the heat treatment chamber. No procedure change is necessary, and adverse effects from heat such as a motor can be avoided.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제5도는 상기 열처리장치의 승강장치부분을 나타내는 정면도, 제6도는 상기 승강장치부분의 평면도, 제7도는 상기 열처리장치에 있어서 본 발명이 적용된 물품지지간격 조정장치의 구성예를 나타내는 단면도.FIG. 5 is a front view showing a lift device portion of the heat treatment apparatus, FIG. 6 is a plan view of the lift device portion, and FIG. 7 is a sectional view showing a configuration example of the article support spacing adjusting device to which the present invention is applied in the heat treatment device.
Claims (1)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP09053796A JP3622932B2 (en) | 1996-03-18 | 1996-03-18 | Article support interval adjusting device for heat treatment apparatus |
JP96-90537 | 1996-03-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970066485A true KR970066485A (en) | 1997-10-13 |
KR100215255B1 KR100215255B1 (en) | 1999-08-16 |
Family
ID=14001174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019970002731A KR100215255B1 (en) | 1996-03-18 | 1997-01-30 | Adjusting device of object supporting span for thermal treatment unit |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP3622932B2 (en) |
KR (1) | KR100215255B1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3929364B2 (en) * | 2002-06-26 | 2007-06-13 | エスペック株式会社 | Substrate support and loading / unloading device |
JP5613943B2 (en) * | 2010-03-29 | 2014-10-29 | 株式会社ファインシンター | Continuous sintering furnace |
CN102435307B (en) * | 2011-11-09 | 2013-09-18 | 深圳市华星光电技术有限公司 | Detection method of UV (Ultraviolet) illumination of multi-layer UV hot oven in TFT-LCD (Thin Film Transistor-Liquid Crystal Display) manufacturing process and combined disk extraction device for implementing detection method |
-
1996
- 1996-03-18 JP JP09053796A patent/JP3622932B2/en not_active Expired - Fee Related
-
1997
- 1997-01-30 KR KR1019970002731A patent/KR100215255B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPH09250885A (en) | 1997-09-22 |
KR100215255B1 (en) | 1999-08-16 |
JP3622932B2 (en) | 2005-02-23 |
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