KR970064170U - Illumination device for observation inside the chamber - Google Patents
Illumination device for observation inside the chamberInfo
- Publication number
- KR970064170U KR970064170U KR2019960011218U KR19960011218U KR970064170U KR 970064170 U KR970064170 U KR 970064170U KR 2019960011218 U KR2019960011218 U KR 2019960011218U KR 19960011218 U KR19960011218 U KR 19960011218U KR 970064170 U KR970064170 U KR 970064170U
- Authority
- KR
- South Korea
- Prior art keywords
- chamber
- illumination device
- observation inside
- observation
- illumination
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960011218U KR200145041Y1 (en) | 1996-05-09 | 1996-05-09 | Illumination device for observation inside the chamber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960011218U KR200145041Y1 (en) | 1996-05-09 | 1996-05-09 | Illumination device for observation inside the chamber |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970064170U true KR970064170U (en) | 1997-12-11 |
KR200145041Y1 KR200145041Y1 (en) | 1999-06-15 |
Family
ID=60930266
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960011218U KR200145041Y1 (en) | 1996-05-09 | 1996-05-09 | Illumination device for observation inside the chamber |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200145041Y1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100397193B1 (en) * | 2001-09-18 | 2003-09-13 | 주성엔지니어링(주) | wafer sensing device |
-
1996
- 1996-05-09 KR KR2019960011218U patent/KR200145041Y1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100397193B1 (en) * | 2001-09-18 | 2003-09-13 | 주성엔지니어링(주) | wafer sensing device |
Also Published As
Publication number | Publication date |
---|---|
KR200145041Y1 (en) | 1999-06-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20080201 Year of fee payment: 10 |
|
LAPS | Lapse due to unpaid annual fee |