KR970064170U - Illumination device for observation inside the chamber - Google Patents

Illumination device for observation inside the chamber

Info

Publication number
KR970064170U
KR970064170U KR2019960011218U KR19960011218U KR970064170U KR 970064170 U KR970064170 U KR 970064170U KR 2019960011218 U KR2019960011218 U KR 2019960011218U KR 19960011218 U KR19960011218 U KR 19960011218U KR 970064170 U KR970064170 U KR 970064170U
Authority
KR
South Korea
Prior art keywords
chamber
illumination device
observation inside
observation
illumination
Prior art date
Application number
KR2019960011218U
Other languages
Korean (ko)
Other versions
KR200145041Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960011218U priority Critical patent/KR200145041Y1/en
Publication of KR970064170U publication Critical patent/KR970064170U/en
Application granted granted Critical
Publication of KR200145041Y1 publication Critical patent/KR200145041Y1/en

Links

KR2019960011218U 1996-05-09 1996-05-09 Illumination device for observation inside the chamber KR200145041Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960011218U KR200145041Y1 (en) 1996-05-09 1996-05-09 Illumination device for observation inside the chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960011218U KR200145041Y1 (en) 1996-05-09 1996-05-09 Illumination device for observation inside the chamber

Publications (2)

Publication Number Publication Date
KR970064170U true KR970064170U (en) 1997-12-11
KR200145041Y1 KR200145041Y1 (en) 1999-06-15

Family

ID=60930266

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960011218U KR200145041Y1 (en) 1996-05-09 1996-05-09 Illumination device for observation inside the chamber

Country Status (1)

Country Link
KR (1) KR200145041Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100397193B1 (en) * 2001-09-18 2003-09-13 주성엔지니어링(주) wafer sensing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100397193B1 (en) * 2001-09-18 2003-09-13 주성엔지니어링(주) wafer sensing device

Also Published As

Publication number Publication date
KR200145041Y1 (en) 1999-06-15

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
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FPAY Annual fee payment

Payment date: 20080201

Year of fee payment: 10

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