KR970063398A - Sensor board of semiconductor wafer counting device - Google Patents
Sensor board of semiconductor wafer counting device Download PDFInfo
- Publication number
- KR970063398A KR970063398A KR1019960004815A KR19960004815A KR970063398A KR 970063398 A KR970063398 A KR 970063398A KR 1019960004815 A KR1019960004815 A KR 1019960004815A KR 19960004815 A KR19960004815 A KR 19960004815A KR 970063398 A KR970063398 A KR 970063398A
- Authority
- KR
- South Korea
- Prior art keywords
- sensor board
- semiconductor wafer
- wafer counting
- counting apparatus
- socket
- Prior art date
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- Testing Of Individual Semiconductor Devices (AREA)
Abstract
반도체 웨이퍼 계수장치의 센서보드, 특히 상기 센서보드에 사용되는 수 ·발광소자 접속구조가 개시되어 있다.A sensor board of a semiconductor wafer counting apparatus, particularly, a water / light emitting element connection structure used in the sensor board is disclosed.
본 발명의 반도체 웨이퍼 계수장치의 센서보드는 광소자 접속부의 소정 위치에 웨이퍼 계수장치의 회로와 연결되는 소켓형 커넥터가 형성되어 각 수 ·발광소자의 접속 리드가 상기 소켓형 커넥터에 소켓 접속되도록 이루어지는 것을 특징으로 한다.A sensor board of a semiconductor wafer counting apparatus according to the present invention includes a socket-type connector connected to a circuit of a wafer counting apparatus at a predetermined position of an optical element connecting unit, and the connection leads of each water / light emitting element are socket- .
따라서, 개별 소자에 고장이 발생할 경우 수리가 간단하므로 설비의 가동중지 시간을 줄이고, 교체시 소요되는 경비를 절약할 수 있는 효과가 있다.Therefore, when a failure occurs in an individual device, the repair is simple, so that it is possible to reduce the downtime of equipment and save the cost of replacement.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.
제2도는 본 발명의 일 실시예인 웨이퍼 계수장치의 센서보드에서의 광소자 접속구조를 나타내는 도면이다.FIG. 2 is a view showing an optical element connection structure in a sensor board of a wafer counting apparatus according to an embodiment of the present invention. FIG.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960004815A KR970063398A (en) | 1996-02-27 | 1996-02-27 | Sensor board of semiconductor wafer counting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960004815A KR970063398A (en) | 1996-02-27 | 1996-02-27 | Sensor board of semiconductor wafer counting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR970063398A true KR970063398A (en) | 1997-09-12 |
Family
ID=66222126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019960004815A KR970063398A (en) | 1996-02-27 | 1996-02-27 | Sensor board of semiconductor wafer counting device |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR970063398A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100375632B1 (en) * | 2001-01-04 | 2003-03-15 | 엘지이노텍 주식회사 | Attachment structure of cds sensor |
-
1996
- 1996-02-27 KR KR1019960004815A patent/KR970063398A/en not_active Application Discontinuation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100375632B1 (en) * | 2001-01-04 | 2003-03-15 | 엘지이노텍 주식회사 | Attachment structure of cds sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WITN | Withdrawal due to no request for examination |