KR970063379A - Light source - Google Patents

Light source Download PDF

Info

Publication number
KR970063379A
KR970063379A KR1019970003596A KR19970003596A KR970063379A KR 970063379 A KR970063379 A KR 970063379A KR 1019970003596 A KR1019970003596 A KR 1019970003596A KR 19970003596 A KR19970003596 A KR 19970003596A KR 970063379 A KR970063379 A KR 970063379A
Authority
KR
South Korea
Prior art keywords
condensing mirror
cooling wind
discharge lamp
mercury
light source
Prior art date
Application number
KR1019970003596A
Other languages
Korean (ko)
Other versions
KR100428959B1 (en
Inventor
기요타다 나카무라
아키라 사토미
도시유키 시마
신키치 모리모토
Original Assignee
다나카 아키히로
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다나카 아키히로, 우시오덴키 가부시키가이샤 filed Critical 다나카 아키히로
Publication of KR970063379A publication Critical patent/KR970063379A/en
Application granted granted Critical
Publication of KR100428959B1 publication Critical patent/KR100428959B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
    • H01J61/822—High-pressure mercury lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
    • H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour

Landscapes

  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Fastening Of Light Sources Or Lamp Holders (AREA)
  • Liquid Crystal (AREA)
  • Projection Apparatus (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)

Abstract

본 발명은 정격소비전력이 큰 수은방전등이 집광미러내에 배치되어, 전방 개구부로부터 흐르는 냉각풍을 발생시키는 수단을 가지는 광원장치로서, 점등했을 때에 봉입된 수은이 완전히 증발하여 충분히 큰 강도의 광방사가 얻어지고, 전방 마우스피스의 과열상태를 유효하게 방지할 수 있는 광원장치를 제공하는 것을 목적으로 하며, 본 발명의 광원장치는 집광미러와, 집광미러의 광축을 따라 뻗도록 배치된 중앙팽출부분과 양단의 봉지관부를 가지는 봉체를 구비하여 이루어지고, 수은의 봉입량이 25㎎/㎤ 이상으로, 정격 소비전력이 2.5kw 이상의 수은방전등과, 집광미러의 전방개구로부터 중앙기부를 향해 흐르도록 냉각풍을 발생시키는 냉각풍 발생수단과, 수은방전등의 전방측 봉지관부의 마우스피스에 설치된 집광미러이 전방개구로부터의 냉각풍을 광축으로부터 이간하도록 외방으로 편향시키는 냉각풍 편향부분을 가진 금속판부재를 가진다.According to the present invention, a mercury discharge lamp having a high rated power consumption is disposed in a condenser mirror, and has a means for generating cooling wind flowing from the front opening. The present invention provides a light source device capable of effectively preventing overheating of the front mouthpiece, and the light source device of the present invention comprises: a condensing mirror, a central expansion portion arranged to extend along an optical axis of the condensing mirror; It is provided with a sealing body having a sealing tube portion at both ends, and the cooling air is flowed so that the amount of mercury is sealed at 25 mg / cm 3 or more, and the rated power consumption flows from the front opening of the condensing mirror to the central base from a mercury discharge lamp having a power consumption of 2.5 kW or more. Cooling wind generating means to generate and a condensing mirror provided in the mouthpiece of the front side encapsulation tube of a mercury discharge lamp are cooled from the front opening. A has a plate member having a cooling air deflecting portion to deflect outward so as to apart from the optical axis.

Description

광원장치Light source

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명의 광원장치의 일례의 구성을 도시한 설명도.1 is an explanatory diagram showing a configuration of an example of a light source device of the present invention.

제2도는 본 발명의 광원장치의 수은방전등의 구성의 일례를 도시한 설명도.2 is an explanatory diagram showing an example of the configuration of a mercury discharge lamp of the light source device of the present invention.

제3도는 금속판부재의 일례를 도시한 사시도.3 is a perspective view showing an example of a metal plate member.

제4도는 금속판부재의 다른 예를 도시한 사시도.4 is a perspective view showing another example of the metal plate member.

제5도는 금속판부재의 또 다른 예를 도시한 사시도.5 is a perspective view showing another example of a metal plate member.

제6도는 금속판부재의 다른 예를 도시한 사시도.6 is a perspective view showing another example of the metal plate member.

제7도는 호온(HORN) 형상의 핀을 가지는 금속판부재에 의한 예를 도시한 설명도.FIG. 7 is an explanatory view showing an example of a metal plate member having a HORN-shaped pin. FIG.

Claims (3)

집광미러와, 이 집광미러의 광축을 따라 뻗도록 배치된 중앙팽출부분과 양단의 봉지관부를 가지는 봉체를 구비하여 이루어지고, 수은의 봉입량이 25㎎/㎤ 이상이고 정격 소비전력이 2.5kw 이상인 수은방전등과, 집광미러의 전방개구로부터 중앙기부를 향해서 흐르도록 냉각풍을 발생시키는 냉각풍 발생수단과, 수은방전등의 전방측 봉지관부의 마우스피스에 설치된 집광미러의 전방개구로부터의 냉각풍을 광축으로부터 이간하도록 외방으로 편향시키는 냉각풍 편향부분을 가지는 금속판부재를 가지는 것을 특징으로 하는 광원장치.A condensing mirror and a sealing body having a central bulging portion and an encapsulation tube at both ends arranged to extend along the optical axis of the condensing mirror, the mercury having an amount of mercury of 25 mg / cm 3 or more and a rated power consumption of 2.5 kW or more; The discharge lamp, cooling wind generating means for generating cooling wind to flow from the front opening of the condenser mirror toward the central base portion, and cooling wind from the front opening of the condensing mirror provided at the mouthpiece of the front encapsulation tube of the mercury discharge lamp from the optical axis. And a metal plate member having a cooling wind deflection portion for deflecting outward so as to be spaced apart. 제1항에 있어서, 집광미러의 광축에 직각인 민내에 있어서의 금속판부재의 최대직경이 봉체의 중앙팽출부분의 최대 외경 이하인 것을 특징으로 하는 광원장치.The light source device according to claim 1, wherein the maximum diameter of the metal plate member in the house perpendicular to the optical axis of the condensing mirror is equal to or less than the maximum outer diameter of the central expansion portion of the rod. 제1항 또는 제2항에 있어서, 금속판부재의 냉각풍 편향부분이 수은방전등의 봉체의 중앙팽출부분의 전면영역을 덮는 커버부분을 가지는 것을 특징으로 하는 광원장치.The light source device according to claim 1 or 2, wherein the cooling wind deflection portion of the metal plate member has a cover portion covering the front region of the central expansion portion of a rod such as a mercury discharge lamp. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019970003596A 1996-02-05 1997-02-05 Light source device KR100428959B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP96-18507 1996-02-05
JP01850796A JP3189661B2 (en) 1996-02-05 1996-02-05 Light source device

Publications (2)

Publication Number Publication Date
KR970063379A true KR970063379A (en) 1997-09-12
KR100428959B1 KR100428959B1 (en) 2004-07-16

Family

ID=11973547

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970003596A KR100428959B1 (en) 1996-02-05 1997-02-05 Light source device

Country Status (2)

Country Link
JP (1) JP3189661B2 (en)
KR (1) KR100428959B1 (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000082322A (en) * 1998-09-08 2000-03-21 Ushio Inc Light source unit
EP3226073A3 (en) 2003-04-09 2017-10-11 Nikon Corporation Exposure method and apparatus, and method for fabricating device
TW201834020A (en) 2003-10-28 2018-09-16 日商尼康股份有限公司 Optical illumination device, exposure device, exposure method and device manufacturing method
TW201809801A (en) 2003-11-20 2018-03-16 日商尼康股份有限公司 Optical illuminating apparatus, exposure device, exposure method, and device manufacturing method
TWI437618B (en) 2004-02-06 2014-05-11 尼康股份有限公司 Polarization changing device, optical illumination apparatus, light-exposure apparatus and light-exposure method
EP1881521B1 (en) 2005-05-12 2014-07-23 Nikon Corporation Projection optical system, exposure apparatus and exposure method
KR101685858B1 (en) 2006-09-01 2016-12-12 가부시키가이샤 니콘 Discharge lamp, light source apparatus, exposure apparatus and exposure apparatus manufacturing method
US9165738B2 (en) 2007-04-12 2015-10-20 Nikon Corporation Discharge lamp, connecting cable, light source apparatus, and exposure apparatus
KR101580333B1 (en) 2007-04-12 2015-12-23 가부시키가이샤 니콘 Discharge lamp cable for connection light source device and exposure device
KR101881789B1 (en) 2007-04-12 2018-07-25 가부시키가이샤 니콘 Discharge lamp, cable for connection, light source device, and exposure device
US7728495B2 (en) * 2007-08-01 2010-06-01 Osram Sylvania Inc. HID lamp with frit seal thermal control
DE102007045079A1 (en) * 2007-09-21 2009-04-02 Osram Gesellschaft mit beschränkter Haftung High pressure discharge lamp
JP5267029B2 (en) 2007-10-12 2013-08-21 株式会社ニコン Illumination optical apparatus, exposure apparatus, and device manufacturing method
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9116346B2 (en) 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
JP4811482B2 (en) 2009-03-16 2011-11-09 セイコーエプソン株式会社 Light source device and projector
DE102009029867A1 (en) * 2009-06-22 2010-12-23 Osram Gesellschaft mit beschränkter Haftung High pressure discharge lamp
JP6645532B2 (en) * 2018-04-11 2020-02-14 株式会社ニコン Light source device, exposure apparatus, and device manufacturing method
JP2020060798A (en) * 2020-01-09 2020-04-16 株式会社ニコン Light source device, exposure device, lamp, maintenance method and device manufacturing method
JP2022162413A (en) * 2021-04-12 2022-10-24 キヤノン株式会社 Lamp, light source device, exposure apparatus, and article manufacturing method

Also Published As

Publication number Publication date
JP3189661B2 (en) 2001-07-16
KR100428959B1 (en) 2004-07-16
JPH09213129A (en) 1997-08-15

Similar Documents

Publication Publication Date Title
KR970063379A (en) Light source
US5561338A (en) Packaged arc lamp and cooling assembly in a plug-in module
BR9912055A (en) Outdoor wrap for video surveillance system
US5420769A (en) High temperature lamp assembly with improved thermal management properties
HU204205B (en) Treating lamp operating by polarized light usable for biostimulation purpose
US7350926B2 (en) Light source apparatus and an image display apparatus
DE59106397D1 (en) High power radiator.
SU810091A3 (en) Luminaire
JPH06203806A (en) Unit of electric lamp and reflector
BR9806111A (en) Compact horn speaker.
KR920008829A (en) Heat removal structure in electric discharge lamp
KR910011531A (en) Vehicle headlights
US6609816B2 (en) High efficiency illuminator
JP2001135134A5 (en)
ATE217444T1 (en) LIQUID-COOLED DISCHARGE LAMP
US5589726A (en) Arc lamp with external magnetic means
ES2065513T3 (en) LAMP.
US6578991B2 (en) Bulb cooling
EP1530741A1 (en) Backlight device, liquid crystal display and method of lighting a liquid crystal display
WO2000070641A1 (en) Vortex cooled lamp box for fiber optic illumination systems
DK0994294T3 (en) Lighting device for mounting on a first, a light output plane defining wall
KR980003781A (en) Light source lamp for projector
KR960001588A (en) searchlight
JPS6115177A (en) Display element
JPH05234402A (en) Illuminator

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20130321

Year of fee payment: 10

FPAY Annual fee payment

Payment date: 20140319

Year of fee payment: 11

FPAY Annual fee payment

Payment date: 20160318

Year of fee payment: 13

EXPY Expiration of term