KR970059857U - Alignment mark detection device - Google Patents

Alignment mark detection device

Info

Publication number
KR970059857U
KR970059857U KR2019960008002U KR19960008002U KR970059857U KR 970059857 U KR970059857 U KR 970059857U KR 2019960008002 U KR2019960008002 U KR 2019960008002U KR 19960008002 U KR19960008002 U KR 19960008002U KR 970059857 U KR970059857 U KR 970059857U
Authority
KR
South Korea
Prior art keywords
detection device
alignment mark
mark detection
alignment
mark
Prior art date
Application number
KR2019960008002U
Other languages
Korean (ko)
Other versions
KR200149838Y1 (en
Inventor
이동관
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019960008002U priority Critical patent/KR200149838Y1/en
Publication of KR970059857U publication Critical patent/KR970059857U/en
Application granted granted Critical
Publication of KR200149838Y1 publication Critical patent/KR200149838Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR2019960008002U 1996-04-15 1996-04-15 Alignment marks detecting apparatus KR200149838Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960008002U KR200149838Y1 (en) 1996-04-15 1996-04-15 Alignment marks detecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960008002U KR200149838Y1 (en) 1996-04-15 1996-04-15 Alignment marks detecting apparatus

Publications (2)

Publication Number Publication Date
KR970059857U true KR970059857U (en) 1997-11-10
KR200149838Y1 KR200149838Y1 (en) 1999-06-15

Family

ID=19453769

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960008002U KR200149838Y1 (en) 1996-04-15 1996-04-15 Alignment marks detecting apparatus

Country Status (1)

Country Link
KR (1) KR200149838Y1 (en)

Also Published As

Publication number Publication date
KR200149838Y1 (en) 1999-06-15

Similar Documents

Publication Publication Date Title
DE19781181D2 (en) Alignment device
DE69510357D1 (en) POSITION DETECTING DEVICE
DE69702152D1 (en) Paper end detection device
DE59709624D1 (en) Position measuring device
DE69720610D1 (en) Pre-ignition detection device
DE69724342D1 (en) Vibration-suppression device
DE69927583D1 (en) ALIGNMENT DEVICE
DE59504960D1 (en) Position detection device
DE59703837D1 (en) Position measuring device
DE69623539D1 (en) Position detection device
DE59712893D1 (en) MEASURING DEVICE
DE69737963D1 (en) Reading-recording device
DK0880623T3 (en) Line Marking Device
DE69714175D1 (en) indicator device
DE59608134D1 (en) Position detection device
DE69517353D1 (en) Moment detection device
DE69523800D1 (en) Fixed point detection device
DE69730501D1 (en) MEASURING DEVICE
DE69722344D1 (en) OBJECT DETECTION DEVICE
DE69705049D1 (en) IDENTIFICATION DEVICE
DE69720029D1 (en) LIGHT DETECTION DEVICE
DE69739452D1 (en) Peak detection device
DE69730919D1 (en) Sheet sensing device
KR970059857U (en) Alignment mark detection device
KR960006388U (en) Double-sided marking device

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20100224

Year of fee payment: 12

EXPY Expiration of term