KR970059834U - 스피너의 배관 시스템 - Google Patents

스피너의 배관 시스템

Info

Publication number
KR970059834U
KR970059834U KR2019960007364U KR19960007364U KR970059834U KR 970059834 U KR970059834 U KR 970059834U KR 2019960007364 U KR2019960007364 U KR 2019960007364U KR 19960007364 U KR19960007364 U KR 19960007364U KR 970059834 U KR970059834 U KR 970059834U
Authority
KR
South Korea
Prior art keywords
spinner
plumbing system
plumbing
Prior art date
Application number
KR2019960007364U
Other languages
English (en)
Other versions
KR0139964Y1 (ko
Inventor
이창남
이기호
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR2019960007364U priority Critical patent/KR0139964Y1/ko
Publication of KR970059834U publication Critical patent/KR970059834U/ko
Application granted granted Critical
Publication of KR0139964Y1 publication Critical patent/KR0139964Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR2019960007364U 1996-04-06 1996-04-06 스피너의 배관 시스템 KR0139964Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960007364U KR0139964Y1 (ko) 1996-04-06 1996-04-06 스피너의 배관 시스템

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960007364U KR0139964Y1 (ko) 1996-04-06 1996-04-06 스피너의 배관 시스템

Publications (2)

Publication Number Publication Date
KR970059834U true KR970059834U (ko) 1997-11-10
KR0139964Y1 KR0139964Y1 (ko) 1999-04-15

Family

ID=19453407

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960007364U KR0139964Y1 (ko) 1996-04-06 1996-04-06 스피너의 배관 시스템

Country Status (1)

Country Link
KR (1) KR0139964Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030095091A (ko) * 2002-06-11 2003-12-18 동부전자 주식회사 반도체 장치에 있어서의 희석제 공급 시스템

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030095091A (ko) * 2002-06-11 2003-12-18 동부전자 주식회사 반도체 장치에 있어서의 희석제 공급 시스템

Also Published As

Publication number Publication date
KR0139964Y1 (ko) 1999-04-15

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