KR970058393U - 스퍼터링 장치의 실드구조 - Google Patents

스퍼터링 장치의 실드구조

Info

Publication number
KR970058393U
KR970058393U KR2019960009644U KR19960009644U KR970058393U KR 970058393 U KR970058393 U KR 970058393U KR 2019960009644 U KR2019960009644 U KR 2019960009644U KR 19960009644 U KR19960009644 U KR 19960009644U KR 970058393 U KR970058393 U KR 970058393U
Authority
KR
South Korea
Prior art keywords
shield structure
sputtering device
sputtering
shield
Prior art date
Application number
KR2019960009644U
Other languages
English (en)
Other versions
KR200150929Y1 (ko
Inventor
정승호
김병조
안교준
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019960009644U priority Critical patent/KR200150929Y1/ko
Publication of KR970058393U publication Critical patent/KR970058393U/ko
Application granted granted Critical
Publication of KR200150929Y1 publication Critical patent/KR200150929Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
    • H01J37/32504—Means for preventing sputtering of the vessel

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
KR2019960009644U 1996-04-29 1996-04-29 스퍼터링 장치의 실드구조 KR200150929Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960009644U KR200150929Y1 (ko) 1996-04-29 1996-04-29 스퍼터링 장치의 실드구조

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960009644U KR200150929Y1 (ko) 1996-04-29 1996-04-29 스퍼터링 장치의 실드구조

Publications (2)

Publication Number Publication Date
KR970058393U true KR970058393U (ko) 1997-11-10
KR200150929Y1 KR200150929Y1 (ko) 1999-07-15

Family

ID=19454738

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960009644U KR200150929Y1 (ko) 1996-04-29 1996-04-29 스퍼터링 장치의 실드구조

Country Status (1)

Country Link
KR (1) KR200150929Y1 (ko)

Also Published As

Publication number Publication date
KR200150929Y1 (ko) 1999-07-15

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