KR970056071U - 마이크로파 전달장치 - Google Patents

마이크로파 전달장치

Info

Publication number
KR970056071U
KR970056071U KR2019960004797U KR19960004797U KR970056071U KR 970056071 U KR970056071 U KR 970056071U KR 2019960004797 U KR2019960004797 U KR 2019960004797U KR 19960004797 U KR19960004797 U KR 19960004797U KR 970056071 U KR970056071 U KR 970056071U
Authority
KR
South Korea
Prior art keywords
transmission device
microwave transmission
microwave
transmission
Prior art date
Application number
KR2019960004797U
Other languages
English (en)
Other versions
KR0140089Y1 (ko
Inventor
이원백
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019960004797U priority Critical patent/KR0140089Y1/ko
Publication of KR970056071U publication Critical patent/KR970056071U/ko
Application granted granted Critical
Publication of KR0140089Y1 publication Critical patent/KR0140089Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32229—Waveguides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
KR2019960004797U 1996-03-14 1996-03-14 마이크로파 전달장치 KR0140089Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960004797U KR0140089Y1 (ko) 1996-03-14 1996-03-14 마이크로파 전달장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960004797U KR0140089Y1 (ko) 1996-03-14 1996-03-14 마이크로파 전달장치

Publications (2)

Publication Number Publication Date
KR970056071U true KR970056071U (ko) 1997-10-13
KR0140089Y1 KR0140089Y1 (ko) 1999-04-15

Family

ID=19451870

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960004797U KR0140089Y1 (ko) 1996-03-14 1996-03-14 마이크로파 전달장치

Country Status (1)

Country Link
KR (1) KR0140089Y1 (ko)

Also Published As

Publication number Publication date
KR0140089Y1 (ko) 1999-04-15

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20091126

Year of fee payment: 12

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