KR970052863U - Stockers for semiconductor manufacturing - Google Patents

Stockers for semiconductor manufacturing

Info

Publication number
KR970052863U
KR970052863U KR2019960003695U KR19960003695U KR970052863U KR 970052863 U KR970052863 U KR 970052863U KR 2019960003695 U KR2019960003695 U KR 2019960003695U KR 19960003695 U KR19960003695 U KR 19960003695U KR 970052863 U KR970052863 U KR 970052863U
Authority
KR
South Korea
Prior art keywords
stockers
semiconductor manufacturing
semiconductor
manufacturing
Prior art date
Application number
KR2019960003695U
Other languages
Korean (ko)
Other versions
KR200141578Y1 (en
Inventor
윤인희
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR2019960003695U priority Critical patent/KR200141578Y1/en
Publication of KR970052863U publication Critical patent/KR970052863U/en
Application granted granted Critical
Publication of KR200141578Y1 publication Critical patent/KR200141578Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019960003695U 1996-02-29 1996-02-29 Stocker for semiconductor manufacturing KR200141578Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960003695U KR200141578Y1 (en) 1996-02-29 1996-02-29 Stocker for semiconductor manufacturing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960003695U KR200141578Y1 (en) 1996-02-29 1996-02-29 Stocker for semiconductor manufacturing

Publications (2)

Publication Number Publication Date
KR970052863U true KR970052863U (en) 1997-09-08
KR200141578Y1 KR200141578Y1 (en) 1999-04-15

Family

ID=19451311

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960003695U KR200141578Y1 (en) 1996-02-29 1996-02-29 Stocker for semiconductor manufacturing

Country Status (1)

Country Link
KR (1) KR200141578Y1 (en)

Also Published As

Publication number Publication date
KR200141578Y1 (en) 1999-04-15

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20061128

Year of fee payment: 9

LAPS Lapse due to unpaid annual fee