KR970052165A - Power display of semiconductor equipment - Google Patents

Power display of semiconductor equipment Download PDF

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Publication number
KR970052165A
KR970052165A KR1019950067547A KR19950067547A KR970052165A KR 970052165 A KR970052165 A KR 970052165A KR 1019950067547 A KR1019950067547 A KR 1019950067547A KR 19950067547 A KR19950067547 A KR 19950067547A KR 970052165 A KR970052165 A KR 970052165A
Authority
KR
South Korea
Prior art keywords
power supply
ion implanter
manufacturing process
signal
power
Prior art date
Application number
KR1019950067547A
Other languages
Korean (ko)
Other versions
KR100191777B1 (en
Inventor
한정훈
김준영
이승태
문중호
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950067547A priority Critical patent/KR100191777B1/en
Publication of KR970052165A publication Critical patent/KR970052165A/en
Application granted granted Critical
Publication of KR100191777B1 publication Critical patent/KR100191777B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/047—Changing particle velocity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

본 발명은 전원 공급 장치의 전원의 고저로써 반도체 제조 공정에서 적합한 이온을 발생시키는 중전류 이온주입 설비에 있어서, 상기 전원 공급 장치에 원격 표시할 수 있는 수단을 구비하므로써, 상기 전원 공급 장치의 상태를 빠르고 정확하게 파악할 수 있도록 한 반도체 장비의 전원 표시장치에 관한 것이다.The present invention provides a medium current ion implantation facility for generating suitable ions in a semiconductor manufacturing process as a source of power of a power supply, comprising means capable of remote display on the power supply, so that the state of the power supply can be controlled. The present invention relates to a power display device of a semiconductor device for fast and accurate identification.

이와 같이, 상기 이온 주입기내에 구비된 전원 공급 장치의 상태를 원격콘솔 부위에 디스플레이 하여, 반도체 제조 공정에서의 작업자가 상기 전원 공급 장치를 한눈에 파악할 수 있을 뿐만 아니라 상기 전원 고급 장치의 고장시에 신속히 대처 할 수 있으므로써, 반도체 장치의 이온 주입기의 수명을 연장시키고, 반도체 제조 공정의 편의 및 안정화를 기할 수 있게 된다.In this way, the status of the power supply provided in the ion implanter is displayed on the remote console so that the operator in the semiconductor manufacturing process can grasp the power supply at a glance and quickly in case of failure of the advanced power supply. By coping, the life of the ion implanter of the semiconductor device can be extended, and the convenience and stabilization of the semiconductor manufacturing process can be achieved.

Description

반도체 장비의 전원 표시 장치Power display of semiconductor equipment

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명의 실시예에 따라 제조된 중전류 이온 주입기내에 구비된 전원 공급 장치와 전기적으로 연결된 원격 표시 장치의 구조 및 연결 상태를 보여주는 구성도.1 is a block diagram showing a structure and a connection state of a remote display device electrically connected to a power supply provided in a medium current ion implanter manufactured according to an embodiment of the present invention.

Claims (1)

반도체 장치의 이온 주입을 위한 이온 주입기에 있어서, 상기 이온 주입기에 전원을 공급하기 위하여 상기 이온 주입기내에 구비된 전원 공급부(11)와, 상기 전원 공급부(11)와 전기적으로 연결되어 상기 전원 공급부(11)로부터의 아나로그 신호를 디지탈 신호로 바꾼 후, 이를 광신호로 바꾸는 기능을 수행하는 제어회로부(14)와, 상기 제어 회로부(14)와 전기적으로 연결 구성되어 상기 제어 회로부(14)로부터 나온 광신호를 전기신호로 컨버젼하는 광신호 수신부(17)와, 상기 광신호 수신부(17)와 전기적으로 연결 구성되어 상기 광신호 수신부(17)로부터 나온 전기 신호를 디스플레이하기 위한 디스플레이부(20)를 구비하는 것을 특징으로 하는 반도체 장치의 전원 공급 장치.An ion implanter for ion implantation of a semiconductor device, the power supply unit 11 provided in the ion implanter for supplying power to the ion implanter, and the power supply unit 11 is electrically connected to the power supply unit 11 A control circuit section 14 which converts the analog signal from the digital signal into a digital signal and then converts the analog signal into an optical signal, and is electrically connected to the control circuit section 14 so as to emit light from the control circuit section 14. And an optical signal receiving unit 17 for converting a signal into an electrical signal, and a display unit 20 electrically connected to the optical signal receiving unit 17 to display an electrical signal from the optical signal receiving unit 17. A power supply device for a semiconductor device, characterized in that. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950067547A 1995-12-29 1995-12-29 Power signal apparatus of semiconductor device KR100191777B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950067547A KR100191777B1 (en) 1995-12-29 1995-12-29 Power signal apparatus of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950067547A KR100191777B1 (en) 1995-12-29 1995-12-29 Power signal apparatus of semiconductor device

Publications (2)

Publication Number Publication Date
KR970052165A true KR970052165A (en) 1997-07-29
KR100191777B1 KR100191777B1 (en) 1999-06-15

Family

ID=19447786

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950067547A KR100191777B1 (en) 1995-12-29 1995-12-29 Power signal apparatus of semiconductor device

Country Status (1)

Country Link
KR (1) KR100191777B1 (en)

Also Published As

Publication number Publication date
KR100191777B1 (en) 1999-06-15

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